Cooling Capacity: 040 (Cooling Capacity: 3800W/4200W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: B (Earth Leakage Breaker)

Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: High-lift Pump

Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M + T

Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Earth Leakage Breaker

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BM (B + M)

Cooling Capacity: 050 (Cooling Capacity: 4700/5100W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BM (B + M)

Cooling Capacity: 018 (Cooling Capacity: 1700/1900W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: BM (B + M)

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker / Compatible with deionized water (pure water) piping

Type: Thermo-Chiller, Cooling Method: Air-Cooling, Cooling Capacity: 4,700/5,100 W (50/60 Hz), Piping thread type: Rc, Optional specifications: With earth leakage circuit breaker / Compatible with deionized water (pure water) piping

Cooling Capacity: Cooling Capacity: 2100/2400W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M

smcmaintenancepartslist

Seal kit includes a grease pack (20 to 50: 10 g, 63, 80: 20 g). Order with the following part number when only the grease pack is needed.

MGP

: m (kg) 30 16 20 10 When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large. 4 5 3 Caution 2 Handling precautions Note 1) When using as a stopper, select a model with a stroke of 25mm or less. 1 5 10 20 30 40 50 Note 2) Model MGPL (ball bushing) cannot be used as a stopper.

5-Port Solenoid Valve

B A A 4 B A A 4 B A A 4 B A (Connector entry upward direction) A 4 A 4 PE 5EA 1P X 3EB 106.2 23.2 24.6 116.6 96.2 20 20 Vacuum Release Valve with Restrictor 81.6 74.1 30.2 20 49.4 43.8 40.2 40 35 B 2 B 2 B 2 B 2 B 2 2 x M2.6 2 x 4-40 UNC [For NPT(F) thread] 1/8 [4(A), 2(B) port] 12.3 4 x 4.5 (For mounting) One-touch fitting [4(A), 2(B) port] 18 L1 L2 (L5) 5 8 28 Applicable tubing O.D.: 4,

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

B C PF2M701/02/05 /10/50/11/21(-L) PF2M725(-L) Voltage output (1 to 5 V) 1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA *1 The analog output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

CATALOG

D D I T I O N A L S Y M B O L A U T O S W I T C H E S A U T O S W I T C H C A P A B L E R O D E N D See Auto Swirch Accessories Without Magnet D Auto Switch Capable (With Built-in Magnet) Plain Bar L Lever R Roller S T R O K E ( M M) M O U N T I N G O P T I O N S B O R E S I Z E 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 B Through Hole (Standard) A Both Ends Tapped 20 20mm 32

Air Cylinder Series CM2

CM2 R 20 100 A A CDM2 20 100 A A M9BW R With auto switch Number of auto switches Mounting style With auto switch (Built-in magnet) Bottom mounting style A B 2 pcs. Nil S n Front mounting style 1 pc. n pcs.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

suppressor (Station n) (Station 1) 107.5 2 B 2 B 2 B 2 P 1 P 114.5 1 105.5 5 P 1 3 E Individual SUP spacer Individual EXH spacer 1 1 SV4000--00 Interface regulator SV4000--M1 Interface regulator 85.5 14.7 61.8 Max.20 16.2 (Cable assembly) Min. bending radius 20 mm (For DIN rail mounting) (10) (84.5) (When circular connector is mounted) B B B B 202.9 172.9 A A A A B A B A B A B A L Dimension