Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 024 (Cooling Capacity: 2100/2400W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

thread depth N 2 x M thread depth N WN: M12 connector D K F C J E IN B1 B 2 x Port size 1(IN), 2(OUT) port A G 2 x M thread depth N Glossary of Terms [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K 20 1/8, 1/4 43.4 55.3

Table of Contents

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

MY1

50 100 1 2 3 4 5 10 20 30 30 100 200 0.5 m, m, m max. m, m, m max.

HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

15

Mounting orientation and static moment Mounting orientation Static load Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 10 15 20 25 32 40 m m x g x x m x g x y 19 21 25 27 33 40 49 m x g x x m x g x y m x g x (z + A) m x g x x m x g x (z + A) m x g x y M1 M2 M3 Static moment A: Distance between the center of the guide shaft and the upper surface

HRX-OM-X084

Model number: HRR010-AN/WN-10/20 The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR010-AF/WF-10/20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

1

AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.

HRX-OM-X071

Model number: HRR050-AN/WN-20/40The transition connector from Rc to NPT is enclosed as an accessory. For NPT piping, be sure to use this connector. Model number: HRR050-AF/WF-20/40The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: M (Applicable to Deionized Water Piping)

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 3800W/4200W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Method: Water-cooled Refrigeration, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting)], Power Supply: 20 [3-phase 200 VAC (50 Hz); 3-phase 200 to 230 VAC (50/60 Hz], Option: Applicable to Deionized Water Piping

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)

Type: -, Cooling Method: -, Cooling Capacity: 1,700/1,900 W (50/60 Hz), Piping thread type: NPT (PT-NPT conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping