Thermo-chiller/Rack Mount Type

024 030 HRR -W HRR010-W-20 30 20 Facility water flow rate [L/min] Facility water flow rate [L/min] HRR030-W 25 15 HRR024-W 20 15 10 10 HRR018-W 5 5 HRR012-W 0 0 0 10 20 30 40 0 10 20 30 40 50 Facility water inlet temperature [C] Facility water inlet temperature [C] * This is the required facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

HRX-OM-X084

Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type

1

C85 Series CY1B Series REA C95 Bolt fixed from the upside CP95 Herisert tapped NCM F Note 1) For 6, 10 (CY1B) NCA R Note 2) Bolt fixed from the underside: MD D-X 20Body For 6, 10 (CY1B) Data F (1) MM LA R (2) L PA C HB M B HA W MD A Bore size (mm) 6 10 15 20 25 32 40 50 63 M3 x 0.5 x 3l 15 35 12 11 17 6.3 18 10 2.5 M3 x 0.5 x 3l 18 38 17 15 25 9.5 26 10 2.5 25 57 25 6.5 23 4 35 16.5

1

(for sub-plate) w Part numbers shown on the left are for 10 valves (10 pcs.).

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

HRX-OM-W004

HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

MTS

12) Stroke: Up to 20 stroke 0.1 0.1 D-X 0.05 0.05 Weight W (kg) Weight W (kg) 0.04 0.04 200.03 0.03 Data 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Weight W (kg) Weight W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

to 20 stroke Graph (12) Stroke: Up to 20 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 20 25 30 5 0 10 15 20 25 30 Overhang L (mm) Overhang L (mm) Graph (10) Stroke: Up to 30 stroke Graph (13) Stroke: Up to 30 stroke 0.1 0.1 0.05 0.05 Mass W (kg) Mass W (kg) 0.04 0.04 0.03 0.03 0.02 0.02 8 8 0.01 0.01 0 5 10 15 25 20 30 0 5 10 15 20

ZP

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

ZP

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Table of Contents

W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Power consumption Between case and AC line: 1500 VAC for 1 min.

Magnetically Coupled Rodless Cylinder

M2 = W L1 = 10 0.05 = 0.5 [Nm] 2 = M2/M2 max = 0.5/16 = 0.031 W = 1 [kg] = 10 [N] W M Find the value M2 max when Va = 300 mm/s from Graph (3). L1 From V = 1.4 Va We = W V = 4/100 10 1.4 300 = 168 [N] Me3 = 1/3 We (L2 A) = 1/3 1680.032 = 1.8 [Nm] 3 = Me3/Me3 max = 1.8/7.2 = 0.250 cDynamic moment Examine Me3. Find the load equivalent to impact We.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: A (Air-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set)

Cooling Capacity: 018 (Cooling Capacity: 1500/1700W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: N (NPT w/PT-NPT Conversion Fitting Set)