3-Position Rotary Table

10 1.2 12 76 34 8.1 10 50.4 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 8 34.7 70 17 18.5 10 1.2 12 84 37 10.5 10.5 53.5 65h9 67h9 32H9 12 22H9 10 4.5 3 6.5 17 8.6 14 8.5 10 39.7 80 19 21 12 1.6 15.5 100 50 12.4 12.5 60.6 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU JV Q S SC SD SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M4

HRX-OM-R026

Pump capacity 9.4.4 HRSH090-A-20/40-HRSH090-W-20/400.6 60 Circulating fluid pressure [MPa] 0.5 50 Pump head [m] 0.4 40 Outlet Usable flow rate range 0.3 30 Usable flow rate range 0.2 20 Return port 0.1 10 0 0 0 10 20 30 40 50 60 70 Circulating fluid flow [L/min] Fig. 9-8 Pump capacity (HRSH090-A-20/40-HRSH090-W-20/40-) 0 Pump capacity HRSH Series 9-12 HRX-OM-R026 Chapter 9 Documents 9.5

HRX-OM-T002

. 9-1 9.1.2 HRS090-A-40. 9-2 9.1.3 HRS090-A-46. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant with GWP reference . 9-7 9.1.8 Communication specification . 9-7 9.2 Outline dimensions . 9-8 9.2.1 HRS090-A-20/40/46-. 9-8 9.2.2 HRS090-W-20/40/46-. 9-9 9.3 Flow diagram . 9-10 9.3.1 HRS090-A-20/40/46-. 9-10 9.3.2 HRS090-W-20/40/46 . 9-10 9.4 Cooling

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: F (G w/PT-G Conversion Fitting Set), Option: J (Automatic Water Supply Function)

Type: -, Cooling Method: -, Cooling Capacity: 1,100/1,300 W (50/60 Hz), Piping thread type: G (PT-G conversion fitting set included), Optional specifications: Compatible with deionized water (pure water) piping

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Automatic Water Supply Function

Thermo-chiller Series HRS Compact Type (Except HRS050)

HRS012-A-10 HRS012-W-10 HRS018-A-10 HRS018-W-10 Model Air-cooled refrigeration Water-cooled refrigeration Air-cooled refrigeration Water-cooled refrigeration Cooling method Refrigerant Control method Ambient temperature/humidity Note 2) R407C (HFC) PID control Temperature: 5 to 40C, Humidity: 30 to 70% Clear water, 15% ethylene glycol aqueous solution Note 5) Circulating fluid Note 3) Circulating

Made to Order

63 80 100 46.5 10 4.5 T 51.5 10 5 54 10 7 61 17 28 F 67.5 18 35 5 L 73 18 35 L Bore size 20, 25 A + Stroke 83.5 20 43 A + Stroke 98 22 59 Please contact SMC for bore size 20 to 32 with both ends tapped and mounting brackets.

Compact 5-Port Solenoid Valve

Input block stations (Sm) Refer to page 77. 21 For 20 output points(T) For 18 output points (PG/PGC) Symbol Stations Note 02 2 stations Double wiring1 Symbol Stations Note 02 2 stations Double wiring1 26 pins PGC 20 pins PHC 10 pins TC Spring type terminal block box 43 T Terminal block box L1 Lead wire 34 cores 55 L2 17 cores L3 9 cores S6m 09 9 stations 02 2 stations Specified layout2

Air Cylinder NCA1 Series

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

NCA1

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, Terminal block i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VFR5000-20-1AManifold block assembly 10 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

HRX-OM-Q026

The anchor bolts are not attached. 8.1 Specifications HRSH Series 8-4 HRX-OM-Q026 Chapter 8 Documents 8.1.5 Option T High head temp Table 8-5 Specifications of HRSH100/150/200/250-W-20-T1 HRSH200-WModel HRSH100-WHRSH150-WHRSH250-W20-T 20-T 20-T 20-T Rated flow rate (Outlet) L/min 125 (0.5 MPa) Pump capacity Maximum flow rate L/min 180 Circulating fluid system Maximum lifting height m 80 Settable

HRX-OM-S004

-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC.

HRX-OM-X037

35oC 20 15 10 5 0 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [oC] Fig. 9-18 Cooling Capacity (HRL200-W-40 CH1) HRL Series 9.4 Cooling Capacity 9-17 HRX-OM-X037 Chapter 9 Documents 9.4.13 HRL100/200-W-40 CH2 3.0 2.5 Cooling capacity [kW] Ambienttemperature 45oC or less 2.0 (Max. 1.5 kW) 1.5 Rated 1.0 kW 1.0 0.5 0.0 10 15 20 25 30 35 40 Circulating fluid temperature [oC] Up to

Electro-Pneumatic Positioner NIP600.NIP610

supply pressure Air consumption 1 , . . ^ 1 t ^ .

For the HRS012/018/024/030 option “T” (high-pressure pump) and the HRS050/060, after 8000 hours, alarm code “AL28” (pump maintenance) will be activated.
We recommend that you check for leaks and replace the mechanical seal at this time. Consider requesting maintenance from a maintenance company. We can recommend service providers if needed.

Adapter Material: Aluminum, Adapter: T (5.5 Stage: w/Adapter and Guide Attachment; 2.5 Stage: w/Adapter), Pad Diameter: 20 (ø20), Stage: JT2SF (2.5 Stage), Guide Attachment: WF (w/Flat Attachment), Connection Thread: A16 (M16 x 1, Plate Mounting, Male Thread), Vacuum Inlet: BN01 (NPT1/8, Female Thread)