Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: High-pressure Pump Mounted

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: D+M+T+U

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: T+U

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: Applicabe to DI Water Piping

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: Conforming to UL Standards

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: w/Electric Conductivity Control Function, Applicable to DI Water Piping

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: D+M+T1+U

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DM+T1+U+Y

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: Air-cooled, Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: M+T1+U+Y

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: DMT (DM+T)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: UY (U+Y)

Cooling Capacity: 024 [2000/2400, (50/60 Hz)], Cooling Method: A (Air-cooled), Pipe Thread: N [NPT (w/Rc-NPT Conversion Fitting Set)], Option: TUY (T+U+Y)

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

VQ5000

Note 2) Splash proof specification is not available for F and T1.

1

COM. () 20 COM.

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnic System Specif ication (continued) 2.

Vacuum

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnica System Specif ication (continued) 2.

Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

Vacuum Equipment

Average suction flow rate V x 60 T1 V x 60 T1 Q = Q = + QL T2 = 3 x T1 T2 = 3 x T1 Q : Average suction flow rate /min (ANR) V : Piping capacity () T1 : Arrival time to stable Pv 63% after adsorption (sec.) T2 : Arrival time to stable Pv 95% after adsorption (sec.) QL : Leakage at work adsorption /min (ANR) 2.