Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

Rotary Table/

w c k n tio ta ro m mu xi Ma Positioning pin hole Positioning pin hole Position of bottom positioning pin hole Position of bottom positioning pin hole With external shock absorber Adjustment angle per rotation of angle adjustment screw 1.4 Size 10 20 30 50 Note) The drawings show the rotation range for the top positioning pin hole of the table.

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: None

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: MT (M + T)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: W (Water-cooled), Pipe Thread: Rc, Option 1: T (High-pressure Pump Mounted)

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: Rc, Option 1: None, Option 2: -

Cooling Capacity: 012 [1000/1200, (50/60 Hz)], Cooling Method: Water-cooled, Pipe Thread: Rc, Option 1: M + T, Option 2: -

Drain Plug (HRR012 to HRR030), CHILLER, RACK MOUNT, REFRIGERATION TYPE, O72, 5 lb

Handle for HRR012-030, CHILLER, RACK MOUNT, REFRIGERATION TYPE, O72, 110 lb

Particle Filter Housing for HRR012-030, CHILLER, RACK MOUNT, REFRIGERATION TYPE, O72, 1.5 lb

DC Power Supply for HRR012 to 030, CHILLER, RACK MOUNT, REFRIGERATION TYPE, O72, 130 lb

Nipple (16xL27) FOR HRR012~030, CHILLER, 729, 0.005 lb

Pump assembly FOR HRR012-030, CHILLER, RACK MOUNT, REFRIGERATION TYPE, O72, 7 lb

Smooth Cylinder/Low Speed Cylinder

REA CDU Double Acting, Single Rod (mm) W B A W B D-M9A D-M9AV D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV Bore size (mm) REB A B W A B W A B W A 10 16 20 25 32 12.5 3.5 (-1.5)1 16.5 7.5 2.5 16.5 7.5 0.5 16.5 7.5 4.5 16.5 7.5 2.5 REC (-2)0.5 16 4 20 8 1.5 20 8 -0.5 20 8 3.5 20 8 1.5 (-4)-1.5 20 6 24 10 0 24 10 -2 24 10 2 24 10 0 CY (-5.5)-3 22.5 7 26.5 11 -1.5 26.5 11 -3.5 26.5 11 0.5 26.5 11 -1.5

Compact Rotary Actuator Series CRQ2

2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

5 Port Solenoid Valve Series VQZ1000/2000/3000

0.27 0.40 0.25 0.10 20 or less 20 or less 36 or less Flow rate (l/min (ANR)) VQZ2250--C 0.74 0.19 0.17 0.63 0.19 0.16 10 or less 13 or less 13 or less 54 0.5MPa Double VQZ2251--C SJ 1.2 0.17 0.26 1.0 0.20 0.24 15 or less 20 or less 20 or less 58 VQZ2251S--C 1.2 0.13 0.27 0.40 0.25 0.10 15 or less 20 or less 20 or less 100 0.3MPa VQZ2350--C SY 0.47 0.23 0.11 0.41 0.28 0.10 25 or less 26 or

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) G 11 13 15 19 N 15 17 20 25 UU 118 139 167 202 D (g6) 15 17 20 25 M 20 22 25 30 L 14 16 19 24 Model CVRA1BW50 CVRA1BW63 CVRA1BW80 CVRA1BW100 Single Shaft Type (mm) DD (h9) D (g6) Valve dimensions VH Keyway dimensions b l S U CA C Model W B BA J K H CB A F VJ 144 (177) 163 (201.5) 186 (230) M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 CVRA1BS50 13.5 8.5 46 17 48 17 36 5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

XC47 to to XC58 XC58 XC59 XC59 S, W, Y S, W, Y S, W, Y S, W, Y S, W, Y 30 to 100 to Change of port direction to XC61 XC61 XC63 One side hydro, One side air XC62 XC62 Reverse mounting of auto switch 50, 63 80, 100 XC64 One side hydro, One side air Chart 8. Combination between -X and -XC (Refer to page 11-7-49 for made-to-order/details on -X.)

Compact Slide Series MXH

7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.