Large Size Vacuum Module: Series ZR

Output voltage (Rated pressure range) Linearity Output impedance Current output Voltage output 1% F.S. or less Approx. 1 k Analog output Environment resistance 4 to 20 mA 2.5% F.S.

Table of Contents

G VX 2 2 1 21 01 G 1 1 Normally Closed (N.C.)

Compact Vacuum Unit Ejector/ Vacuum Pump System

. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.

A_HEC-OM-K001

Signal 1 DC output 2 DC output 3 FG DC connector HED007-C2* (HED003-C2*, HED005-C2*) DDK D/MS3102A20-15S Connect the DC cable connector of Heat Exchanger. Pin No.

Vacuum Unit

V (R type) (K type) Vacuum pressure PV pressure can be changed per station.

90

(K type) Release valve: N.C.

1

Please contact SMC for dimensions since A, AL, D, K, MM, W, H, ZZ dimensions are different from standard. Please contact SMC for dimensions since A, AL, D, E, EA, F , FA, K, MM, H, ZZ dimensions are different from standard.

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

Plug-in Unit

Note 2) The mounting position of the name plate is on the top face of the cover for the terminal block box. 01 1 station The maximum number of stations differs depending on the electrical entry. Cylinder port size Input block COM.

Air Fittings & Tubing

KDM10S-01 Plug Socket 1 8 5 32 KDM10P-01 KDM10P-03 KDM10P-07 KDM10S-03 KDM10S-07 10 1 4 Red KDM10P-09 KDM10S-09 KDM20S-01 KDM20S-03 KDM20S-07 5 16 1 8 KDM20P-01 5 32 1 4 5 16 KDM20P-07 20 KDM20P-03 KDM20P-09 KDM20S-09 Panel mounting qLoosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No.2) until the bracket touches the stop ring.

EX120/121/122

19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area

I

[VF323O (B) (A) ct c2 #\ilIrb Compact size and lisht weighi 1.04inch wide Large flow capaci$ -CvI.o(%) Shgb !|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL.

PSE550/300

ZS-27-01) M3 x 8L Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 16-3-44 13 Series PSE Specific Product Precautions 3 Be sure to read before handling. Set Differential Pressure Range & Rated Differential Pressure Range Caution Set the pressure within the rated differential pressure range.

Low Differential Pressure Sensor

ZS-27-01) M3 x 8L Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 14 Series PSE Specific Product Precautions 3 Be sure to read before handling. Set differential pressure range & Rated differential pressure range Caution Set the pressure within the rated differential pressure range.

Specifications: E (Oil-free, External parts copper-free), Display Pressure: -100 to 0 kPa, Connection Thread: 01 (R 1/8), Option: M (w/M5, Female Thread), Attachment: C2 (Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude)

Specifications: Oil-free, External parts copper-free, Display Pressure: -100 to 0 kPa, Connection Thread: R 1/8, Option: w/M5, Female Thread, Attachment: Clear Cover w/Protrusion, is Removable, Wrench Flats Protrude

Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible