7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

SV

Refer to page 1-7-4.)

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 01M (R 1/8, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Pressure Gauge: G46 (ø42 Outside Diameter, Back Side Thread), Display Pressure: 7 (0.7MPa), Connection Thread: 02M (R 1/4, M5 Female), Attachment: C2 (Clear Cover Removable, Wrench Tighten), Option: X2 (Nickel Plated)

Table of Contents

61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40

7.4

153.9 Note) The L dimension of 2 to 7 stations is the same.

Display Pressure: 0.7MPa, Connection Thread: R 1/4, Grade: General Degreasing, Production Line, Attachment: Clear Cover Removable, Wrench Tighten

Smooth Cylinder/Low Speed Cylinder

FL A B2 C2 D H2 I FD AL E F FT B FX B1 FY FZ G H H1 Bore size (mm) 20 13 26 30 5 8 10.5 18 8 28 7 15.5 13 4 34 60 75 8 0 0.033 41 20 25 17 32 37 6 8 10.5 22 10 33.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 32 17 32 37 6 8 10.5 22 12 37.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 40 22 41 47.3 8 10 13.5 24 14 46.5 7 21 16 5 52 66 36 82 0 0.039 11 50 32 (mm) P S KA N Z NA ZZ NN K MM Bore size (mm

Fieldbus System

Note 5) Note 6) 24 Note) 24 stations Note 7) Note) Max. number of stations depends on the wiring specifications.

HRX-OM-X084

Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Trouble shooting . 7-4 7.3.1 Alarm contents, causes, and troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

7 11 11 7.5 1/8 20.5 (Piping port) 3 position closed center / exhaust center / pressure center [M12 waterproof connector type] 10-SV100(R)-W-01 14.5 13.3 13.5 62.6 51.8 35 14.3 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port)

The G46, G46E, G46-L, G46-SRA/B, GZ46, GZ46E, and GP46 can be panel mounted. Dedicated attachments (cover ring assemblies) are required.
When ordering a pressure gauge with an attachment, indicate “-C” (irremovable clear cover with no protrusion) or “-C2” (removable clear cover with protrusion/with protruding wrench flats) in the part number.

Table of Contents

2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

Table of Contents

ZSE1-01-15CN1 pc.

・When mounting a pressure gauge with a non-standard pressure range on a VEX1 □3□ series regulator, keep in mind that the G36 and the G46 have a max. display pressure of either up to 0.2, up to 0.4, or up to 0.7 MPa.
The part numbers are as follows: G36(46)-2-01, G36(46)-4-01, G36(46)-7-01

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7 !8 !