E-P HYREG

(VY1901 only) 1/4 external pilot port Pressure gauge (Option) G46-10-01 Applicable cable O.D. 4 to 6.5 AN210-02 Silencer (Option) 1/4 Pilot EXH port Pg.7 1/8 Gauge port (For bracket mounting) 4 x M6 thread depth 12 4 x 7 Mounting hole Bracket (Option) VEX9-32A Hexagon socket head cap screw M6 L = 15 (4 pcs.)

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

AR Series Modular Type Regulator

v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Solenoid

Solmldc.pc y indud6 cap, (1)rutbre3 pluo dor 15, (r ) dr 19, (2) (h 13, (2) dn 14, dnd (1) d.r 7 sc@01 t2B sordrdrdcp*3y. t'dud6p, (r) rss$d i@roddng cp...ro.dor t6. 0 ) &l 1q (2) del 13, (2) d.l 14, -d 11 | d.r 7lv5tv rvd'l{1 s6602 Solmidc4 s y. hdude, (1) .ubod a@ds plus rb| r 5, (1) irdi@ro.lign a$nbry dor 1 7& 13, (1 )drr 19, (2) dr 13, 12) d6r 14. and lrl dat 7 (b,vo lve 1"1 1 6 sdendd

E-P HYREG ® Series VY1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G36-10-01 G46-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

, Fluorine-free (20-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40

Pressure Gauge Guide

Model (Standard) Model Pressure range (1) VY1 Indication unit Connection thread Note MPa GP46-10-01 to 02 GP46-10-01 to 02L2 GP46-10-01 to 02L5 0 to 1.0 G 1 8 R MPa 1 4 R PPA Note 1) Do not apply pressure more than the maximum display pressure. This will cause a malfunction. Be sure to read the precautions in page 14-11-15 for selection and installation.

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

AWM20 to AWM40

AWM20 AWD20 AWM30 AWD30 AWM40 AWD40 Model Option Bracket assembly Note 1) AW20P-270AS AR20P-260S AR30P-270AS AR30P-260S AR40P-270AS AR40P-260S G46-10-02 G46-2-02 Set nut G36-10-01 G36-2-01 Round type Note 2) Standard 0.02 to 0.2 MPa set Standard 0.02 to 0.2 MPa set Pressure gauge Square embedded type Note 3) GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge

・When mounting a pressure gauge with a non-standard pressure range on a VEX1 □3□ series regulator, keep in mind that the G36 and the G46 have a max. display pressure of either up to 0.2, up to 0.4, or up to 0.7 MPa.
The part numbers are as follows: G36(46)-2-01, G36(46)-4-01, G36(46)-7-01