5 Port Solenoid Valve

Note) For symbol, refer to page 7.

AR Series Modular Type Regulator

v Note 7) v Note 7) v Note 7) v Note 7) Note 1) Option B, G, H, M are not assembled and supplied loose at the time of shipment.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Applicable related components For details regarding different conditions

Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

Series SV

Cable core wire colors 7 1 8 3 2 8 7 1 8 1 7 3 2 8 2 3 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Connections Connections Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

only)] G36-7-01 G46-7-02 Round type Note 2) 0.7 MPa Pressure gauge Square embedded type Note 3) GC3-7AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring

7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

SV

Refer to page 1-7-4.)

E-P HYREG ® Series VY1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G36-10-01 G46-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Air Cylinder Series CM2

style ZZ + Stroke (mm) H1 H G FZ FY FX ZZ AL E F FT MM Z A B1 B2 C2 H2 I D FL FD K KA N NA NN P S B Bore size (mm) 0 0.033 20 41 8 75 60 13 4 37 18 28 8 7 5 6 15 24 62 15.5 34 13 26 30 10.5 5 8 M8 x 1.25 M20 x 1.5 116 20 0 0.033 25 45 8 75 60 13 4 41 22 10 7 8 15 30 62 19.5 40 17 32 37 10.5 6 8 M26 x 1.5 120 33.5 5.5 M10 x 1.25 26 0 0.033 32 45 8 75 60 13 4 41 22 12 7 10 15 64 19.5 40

E-P HYREG ® Series VY1 1

G Description 04 06 10 02 03 04 02 03 04 VY110 0 1VY120 0 1VY130 0 1VY140 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 VY1D00-M5 VY1A0 0 1-M5 VY150 0 1VY1B0 0 1M 0 5 1 01 02 01 02 PPA B VEX9-32A VEX5-32A VEX7-32A VEX3-32A VEXA-18-2A VEX1-18-1A Bracket (With bolt, washer) AL F VEX1-18-2A VEXA-18-3A G27-10-R1-X207 G G46-10-01 G36-10-01 G27-10-01 Pressure gauge AN120-M5 AN120-M5 Pilot EXH port silencer

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Table of Contents

61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5

7.5

4(A) 2(B) KJL03-C2 5/32" one-touch fitting assembly (Elbow type) KJL02-C2 2 one-touch fitting assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

7.4

153.9 Note) The L dimension of 2 to 7 stations is the same.

Compact Vacuum Unit

(Refer to the Operation Manual.) 7 Compact Vacuum Unit Series ZB Construction !3 u w q e i !4 !5 r t y !2 !2 o !

Smooth Cylinder/Low Speed Cylinder

FL A B2 C2 D H2 I FD AL E F FT B FX B1 FY FZ G H H1 Bore size (mm) 20 13 26 30 5 8 10.5 18 8 28 7 15.5 13 4 34 60 75 8 0 0.033 41 20 25 17 32 37 6 8 10.5 22 10 33.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 32 17 32 37 6 8 10.5 22 12 37.5 7 19.5 13 4 40 60 75 8 0 0.033 45 26 40 22 41 47.3 8 10 13.5 24 14 46.5 7 21 16 5 52 66 36 82 0 0.039 11 50 32 (mm) P S KA N Z NA ZZ NN K MM Bore size (mm