Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

Precision Regulator

IR2120 : G43-10-01 G43-P10-N01-X30 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4. Marking on product Product name plate IR2120 IR2120 IR2120 IR2120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. 1.0 1.0 1.0 1.0 MPa MPa MPa MPa Product code INPUT INPUT INPUT INPUT PRESS. PRESS. PRESS.

Precision Regulator

G43-10-01 G43-P10-N01-X30 Port size 02 : 1/4 03 : 3/8 04 : 1/2 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4. Marking on product Product name plate IR3120 IR3120 IR3120 IR3120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS.

Modular Type Regulator Series AR

Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note

AR20-B to AR60-B

*6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50-B and AR60-B *3 Mounting thread for pressure gauge: 1/8, Pressure gauge type: G43 *4 The only difference from the standard specifications

AW

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal Metal bowl

Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

3M/SMseries

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Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01MS-X3 G49-4-l02MS-X3 0.4 MPa Pressure gauge G49-2-l01MS-X3

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) Note 6) Note 6) Note 6) Note 6) Note 1) When using a non-relieving type with a backflow function, if the inlet pressure is increased slowly, the inlet pressure may continue to the outlet side.

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Note 2) Set nut AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) Round type Note 3) 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Compact 5-Port Solenoid Valve

X3 6 X3 X2 4 97.9 83 83 A 4 A 4 A 4 A 4 120 5 7 7 5 65.5 10 X5 X4 8 4.6 B 2 B 2 B 2 B 2 9 11 14.5 X6 12 14 X7 9.9 2 13 15 (C8: 14.9) (Fitting for the type with P/E ports on the U and/or D sides) 4 x M4 Mounting hole 17.5 (14.8) 7.5 End plate Digital input module Digital output module (Station n) (Station 1) FE terminal (M4) Manifold block internal wiring specifications Nil: Double wiring

I

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EXxx-OMY0006CN

IoT 5. 6. 8 7. PC 8. OS 9. /IDS/IPS 10.

1

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible