Table of Contents

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

FILTER REGULATOR

Rc Rc C3SF-J-A C3SF-A G G C3SFF-J-A NPT C3SF(-Z)-A NPT C3SFN-J(Z)-A B B External B Semi-standard 6 Semi-standard 6J appearance drawing and Port thread Port thread Part no. Part no. part no. Rc Rc C3SF-6J-A C3SF-6-A G G C3SFF-6J-A NPT C3SF-6(Z)-A NPT C3SFN-6J(Z)-A 1/4 HEX17 Option Semi-standard Semi-standard W Port thread Part no.

FILTER REGULATOR

Rc C2SF-J-A Rc C2SF-CJ-A G C2SFF-J-A G C2SFF-CJ-A External NPT C2SFN-J(Z)-A NPT C2SFN-CJ(Z)-A B B appearance drawing and Semi-standard 6J Semi-standard 6CJ part no. Port thread Port thread Part no. Part no. Rc C2SF-6J-A Rc C2SF-6CJ-A G C2SFF-6J-A G C2SFF-6CJ-A 1/8 1/8 NPT C2SFN-6J(Z)-A NPT C2SFN-6CJ(Z)-A HEX14 HEX14 Option Semi-standard Semi-standard 2 Semi-standard 2J Part no. Part no.

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Description Material Note Body A PBT Elbow body PBT No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

VZM400

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !7 POM o POM Valve seat (B) 5-6-36 5 Port Mechanical Valve Metal Seal Series VZM400 Series VZM400 Basic VZM450-01-00 JIS Symbol Accessory mounting hole (Pilot exhaust port) SA VA SA VA 0.5 MPa supply VM 1.0 mm P.T. 16 N F.O.F. VR 2.0 mm O.T. 2-3.5 mounting hole 3.0 mm T.T.

VMx-OMP0001

] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2

PFM7

) ( ): Fluid: CO2 Calibration certificate Flow adjustment valve None With calibration certificate Nil A Nil S None Yes The certificate is written in English and Japanese. Other languages are available as specials.

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-89 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: Rc1/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and

Regulator Unit Combination: [Other FRL Combination Devices] Adapter, Port Size: Rc1/4, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and