ZB-OM00301

04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Fieldbus System

Cylinder port size Symbol Port size C2 With 2 One-touch fitting Note 1) When multiple symbols are specified, indicate them alphabetically. Example) -BKN Note 2) When a back pressure check valve is used only for specified station, specify the back pressure check valve part number, and specify the station number to which the valve is mounted, on the manifold specification sheet.

Moisture Control Tube

Correction Factor C2 for Ambient Air Relative Humidity Vc: Actuator volume (mm3) D : Bore size (mm) s : Stroke (mm) Temperature Relative humidity Correction factor C2 Vc = D2s 4 25C 40C 10C 0.2 0.4 0.6 20% Fig. 2 Piping Volume Chart 0.5 1.0 1.3 40% 140 1.0 1.7 2.8 60% 2.1 4.0 5.9 75% 120 6 tube Correction Factor C3 for Supply Pressure Supply pressure (MPa) Correction factor C3 10 Tube volume

VS 8-2/VS 8-4

Size 26 mm Port size Symbol 03 04 Size 18 mm Size 26 mm Port size 3/8" 1/2" @1 Gasket EVVS1002-9-1H EVVS1001-9-1H Size 18 mm Size 26 mm Note) Part no. for 1 pc. of gasket @2 Tie-rod (2 pcs.)

CM2

NT-02 NT-03 NT-04 13 5 15.0 12.5 M8 x 1.25 17 6 19.6 16.5 M10 x 1.25 22 8 25.4 21.0 M14 x 1.5 Mounting Nut Applicable pin part no. Part no.

CM2

B H C D d NT-02 NT-03 NT-04 M8 X 1.25 13 5 15.0 12.5 CJP M10 X 1.25 17 6 19.6 16.5 M14 X 1.5 22 8 25.4 21.0 CJ2 Mounting Nut (mm) CM2 Material: Carbon steel C85 Applicable pin part No. Part No.

21

Bore size Stroke Head Flange (G): ClM3G R0.5 Effective thread length 2 x FL 4 x FD Mounting hole H2 2 x P 2 x NN G G Width across flats B2 2 x FD Mounting hole Width across flats KA C2 D H1 Corner of the cover I Eh8 FY B MM AL A H Z + Stroke S + Stroke F 1.5 Width across flats B1 Width across flats lNA 20 to 32 FX FZ FT 40 ZZ + Stroke Head Flange (G) (mm) AL 14.5 A 12 B 34 B1 13 B2 26 C2

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B (10) One-touch tube fitting (10 in one set) Body type Port size 02 2 One-touch tube fitting Straight Metric size Elbow 04 4 One-touch tube fitting 01 1/8 One-touch tube fitting Inch size 03 5/32 One-touch tube fitting * For the combination of the elbow type body and the One-touch tube fitting 4, add the suffix -N to the part number.

MXW

M-5J AS1201F-M5-04 (Extension fittings) (Speed controller with One-touch fittings, Elbow style) KJL04-M5 AS1001F-04 (One-touch fitting) (Speed controller with One-touch fittings, In-line style) + + Table for Auto Switch Interference with Speed Controller and Fittings Auto switch model Electrical entry direction Wiring type Auto switch model 3-wire D-M9NV, D-M9PV Solid state switch Perpendicular

Air Slide Table Series MXW

MXW MXJ M-5J (Extension fittings) AS1201F-M5-04 (Speed controller with One-touch fittings, Elbow style) + MXP KJL04-M5 (One-touch fitting) AS1001F-04 (Speed controller with One-touch fittings, In-line style) + MXY Table for Auto Switch Interference with Speed Controller and Fittings Auto switch model Electrical entry direction Auto switch model Wiring type MTS D-M9NV, D-M9PV 3-wire Solid

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Air Fittings & Tubing

Thread R(PT) D2 L1 L2 L3 P A Q1 Q2 M1 M2 1 8 1 4 3 8 18 25 38 4.5 KM14-04-06-02S-3 12.8 10.4 KM14-04-06-03S-3 13 14 17 18 13 10.4 38.2 16 9.9 17 68 71.5 73.5 64 65.5 67.5 6 4 KM14-04-06-01S-3 1 8 1 4 3 8 73.5 76.5 77.5 17 19 15.5 10.4 38.2 16 11.1 18.5 69.5 70.5 71 8 4 KM14-04-08-01S-3 30 38 6 KM14-04-08-02S-3 15.2 10.4 KM14-04-08-03S-3 1 8 1 4 3 8 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5

Connecting Tubes: 12 pcs., Form: Multi-connector, Tube Size: 23 (3.2mm), Accessory: C2 [Cover on Both Sides (2 pcs.)]

Type: [Fitting] One-Touch Coupling, Fitting Type: Other shapes, Tube Size 1(φ): 3.2, Application: Standard/Mini, Shape: [Others] Multi-Connector, Compatible Fluid: Air, Tube Material: Soft Nylon / Polyurethane, Number of Connection Tubes(piece): 12, Connector Type: Multi-connector, Options: Cover, both sides, 2 pcs.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MG Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGP D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C MGQ BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MGG MGC BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

90

Note) When ordering ejector without valve, select Nil for mounting. 04 KJH C2 Port size 04 06 03 07 !

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

Unit Manifold Valve Compact Direct Operated 3 Port Solenoid Valve Series VV061

C2 C1: With connector cable (Length 300 mm) C2: With connector cable (Length 600 mm) C3: With connector cable (Length 1000 mm) Note) The applicable tube of the barb fitting shows the tube outside diameter/inside diameter.

Electric Actuator

IY-G02 IY-G04 16 25, 32 NT-02 NT-04 0.040 0.076 8 21 16.2 7.6 1.5 0.9 Type C retaining ring 8 M8 x 1.25 5 13 15.0 0.040 0.076 10 41.6 36.2 9.6 1.55 1.15 Type C retaining ring 10 M14 x 1.5 8 22 25.4 Mounting Bracket/Part No.