Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

600 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 500 500 0.4 MPa 0.4 MPa 400 400 0.3 MPa 0.3 MPa 300 300 0.2 MPa 0.2 MPa 200 200 0.1 MPa 0.1 MPa 100 100 0 0 20 20 40 40 60 60 80 80 Gripping point L (mm) Gripping point L (mm) MHS3-100D MHS3-100D 1,000 1,000 Pressure 0.6 MPa Pressure 0.6 MPa 800 800 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 600 600 0.3

Made to Order

50 1000 Mounting Brackets/Part No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1000 Bore size (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 1000 Axial foot Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

e

500 2.5 2.5 LC7 LC7 800 Tact time (sec) Tact time (sec) 600 1000 LC8 LC8 2.0 2.0 800 LXF LXF 1.5 1.5 LXP LXP LXS LXS 1000 1.0 1.0 1200 1600 2000 LC6m LC6m 0.5 0.5 LZm LZm LC3F2 LC3F2 0 0 500 1000 0 0 500 1000 Xm Xm Stroke (mm) Stroke (mm) D-m D-m Medium Load (9.80 m/s2) Light Load (19.60 m/s2) 4.0 4.0 E-MY E-MY 300 mm/s 300 mm/s 3.5 3.5 400 400 3.0 3.0 500 500 600 600 2.5 2.5 800 800 Tact

Electric Actuator

, (700), 800 300, (400), 500, 600, (700), 800, (900) Stroke [mm] Note 1) (900), (1000), (1200) 1000, (1200), (1500) Horizontal 66 (30) 121 (55) 99 (45) 187 (85) Work load lb [kg] Note 2) Vertical 11 (5) 22 (10) 22 (10) 44 (20) Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 Stroke Speed Note 3) [mm/

Electric Actuator

200 400 100 500 600 00 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY25 LEY25 30.1 77.2 Lead 3: LEY25AC 26.5 66.1 Lead 3: LEY25C Vertical work load [lb] Vertical work load [lb] 22.0 55.1 17.6 44.1 Lead 6: LEY25AB Lead 6: LEY25B 13.2 33.0 8.8 22.0 Lead 12: LEY25AA Lead 12: LEY25A 4.4 11.0 0 0 300 200 400 100 500 600 0 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Allowable Lateral

10

Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 MB1 Up to 1800 CA2 Up to 1500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 125 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 CS1 -XC88

155

KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04

48

: L4 [mm] Overhang: L4 [mm] m L4 500 mm stroke or less 200 200 600 mm stroke or less 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 500 500 Overhang: L5 [mm] Overhang: L5 [mm] 400 400 500 mm stroke or less m 300 300 L5 600 mm stroke or less 600 mm stroke 200 200 100 100 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb]

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180

Compact

600 600 600 L3 Z 25A400 400 400 400 200 200 200 200 LEC 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 0 5 10 15 20 0 2 4 6 8 10 LEC S Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 500 1000 1000 LEC SS-T 800 400 800 800 L4 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 300 600 600 X 400 200 400 400 m Motorless 200 100 200 200 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 5 10 15 20 0 0 5 10 15 20 LAT

5

1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate strokes not listed above are

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: Z73--Reed, DC Volt., AC Volt, 2 Wire, LED

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)

Piping: Standard, Bore Size: 32mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal