Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: -, Number: -

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125, 150, 50 MY 350, 400, 450, 500, 600, 700, 800, 900, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing bearing CY 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

Table of Contents

, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Table of Contents

) 258-9200-www.stevenengineering.com MHS3-100D MHS3-100D MHS 1,000 1,000 Pressure 0.6 MPa Pressure 0.6 MPa MHC 800 Gripping force (N) 800 Gripping force (N) 0.5 MPa 0.5 MPa MHT 0.4 MPa 0.4 MPa 600 600 0.3 MPa MHY 0.3 MPa 400 0.2 MPa 0.2 MPa 400 0.1 MPa 0.1 MPa MHW 200 200 MRHQ 0 0 20 20 40 40 60 60 80 80 100 100 Gripping point L (mm) Gripping point L (mm) Misc.

Air Cylinder Series MB

450, 500, 600, 700, 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Intermediate strokes other than the above are produced upon receipt of order.

NCG/CG1

Up to 600 156 (167) + l 136 (147) Up to 600 Up to 600 Consists of pin, flat washer and hexagon socket head cap bolt.

Electric Actuator/Slider Type

mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Me L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 600 600 600 600 L5 Wall Y 400 400 400 400 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 LEF Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 Vertical 3 5 10 6 10 20 LEJ Up to 500 1800 1200 600 1800 1200 600 501 to 600 1580 1050 520 1800 1200 600 601 to 700 1170 780 390 1800 1200 600 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110 740 370 901 to 1000 580 390 190 900 600 300 1001 to

15

Specifications Model LEJS40 LEJS63 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 15 30 55 30 45 85 LEF Vertical 3 5 10 6 10 20 Up to 500 1800 1200 600 LEJ 1800 1200 600 501 to 600 1580 1050 520 601 to 700 1170 780 390 LEL 701 to 800 910 600 300 1390 930 460 801 to 900 720 480 240 1110

Air Cylinder Series CA2

CM2 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C CD CX CZ D E F G H1 J K KA Without rod boot With rod boot CG1 40 +0.3 +0.1 +0.058 0 Up to 500 20 to 500 30 27 60 22 44 29.5 16 32 10 15 8 M8 x 1.25 6 14 15.0 10 50 +0.3 +0.1 +0.070 0 Up to 600 20 to 600 35 32 70 27 52 38 20 40 10 17 11 M8 x 1.25 7 18 18.0 12 MB 63 +0.3 +0.1 +0.070 0 Up to 600 20 to 600 35 32 85 27 64 49 20 40 10 17 11

Integrated Controller

800 800 800 800 L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

600 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 500 500 0.4 MPa 0.4 MPa 400 400 0.3 MPa 0.3 MPa 300 300 0.2 MPa 0.2 MPa 200 200 0.1 MPa 0.1 MPa 100 100 0 0 20 20 40 40 60 60 80 80 Gripping point L (mm) Gripping point L (mm) MHS3-100D MHS3-100D 1,000 1,000 Pressure 0.6 MPa Pressure 0.6 MPa 800 800 0.5 MPa 0.5 MPa Gripping force (N) Gripping force (N) 0.4 MPa 0.4 MPa 600 600 0.3

Made to Order

50 1000 Mounting Brackets/Part No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1000 Bore size (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 1000 Axial foot Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Electric Actuator

, (700), 800 300, (400), 500, 600, (700), 800, (900) Stroke [mm] Note 1) (900), (1000), (1200) 1000, (1200), (1500) Horizontal 66 (30) 121 (55) 99 (45) 187 (85) Work load lb [kg] Note 2) Vertical 11 (5) 22 (10) 22 (10) 44 (20) Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 Stroke Speed Note 3) [mm/

Electric Actuator

200 400 100 500 600 00 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY25 LEY25 30.1 77.2 Lead 3: LEY25AC 26.5 66.1 Lead 3: LEY25C Vertical work load [lb] Vertical work load [lb] 22.0 55.1 17.6 44.1 Lead 6: LEY25AB Lead 6: LEY25B 13.2 33.0 8.8 22.0 Lead 12: LEY25AA Lead 12: LEY25A 4.4 11.0 0 0 300 200 400 100 500 600 0 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] Allowable Lateral

155

KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 17 17 17 17 17 17 17 17 29.5 27.7 41.3 31.2 40.1 38.4 45.6 43.9 17 17 19 19 24 24 27 27 14 14 17 17 22 22 26 26 D H2 H1 L2 L1 Nozzle with Male Thread / KN (mm) Model Nozzle diameter D Connection size L1 A With across flats H1 Connection thread KN-R02-600 KN-R03-400 KN-R03-600 KN-R04-400 KN-R04