Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.
switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil (Example) A93 3 mL A93L
A93L 5m . Z (Ex.) F9NWZ Solid state auto switches marked with a "" are produced upon receipt of order.
L A93L MXPJ6/Precision Air Slide Table 6 Specifications Theoretical Output How to Order (N) MXPJ6 10 Cylinder bore size (mm) Piston area (mm) 0.2 Cylinder bore size (mm) Port size Fluid Action Operating pressure Proof pressure Operating pressure (MPa) 6 M3 x 0.5 Air Double acting 0.15 to 0.7MPa 1.05MPa 10 to 60C 50 to 500mm/s Rubber bumper Non-lube +1 0 mm Precision Air Slide Table 0.3 0.4
switch 100V 12V Grommet With 3-wire (equivalent to NPN) 5V A96V A96 IC circuit F9NV F9N 3-wire (NPN) Relay PLC F9PV F9P 3-wire (PNP) F9BV F9B 2-wire Solid state switch 24V With Grommet Diagnosis indication (2-Color indicaiton) 12V F9NWV F9NW 3-wire (NPN) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire PLC: Programable logic controller Lead wire length 0.5m " " (Example)A93 3 m " L " A93L
switch model Electrical entry direction Load voltage Indicator light Electrical entry Wiring (Output) Special function 0.5 Nil 3 (L) Applicable load Type 5 (Z) AC DC 12 V A93 In-line Yes Grommet 2-wire Relay, PLC Reed auto switch 100 V 12 V 24 V M9N 3-wire (NPN) Yes Grommet Relay, PLC Solid state auto switch 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil (Example) A93 3 mL A93L
Piston speed Caution The cylinder speed upper limit that retains the particle generation grade is 400 mm/s. Back matter 5 Clean series: Common Precautions 3 Be sure to read before handling. Refer to the main text for detailed precautions for every series.
Suction flow rate of vacuum suction type (Reference values) Specifications 6 10 Bore size mm Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Piston speed Cushion Stroke adjustable range Port size Air (Non-lube) Size Suction flow rate l/min (ANR) 6 10 1.05MPa 7 15 0.7MPa 0.15MPa 0.1MPa 10C to 60C (With no condensation) 30 to 400 mm/s Rubber
Lead wire length symbols: Auto switches marked with are made-to-order specification. 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Auto switches other than those listed above are also available. Refer to page 11-8-9 for details.
F9BA * Lead wire length 0.5m (Example) A93 3m L (Example) A93L 5m Z (Example) F9NWZ * : Manufactured upon receipt of order. 2.2-2 Compact Cylinder/Standard: Double Acting Single Rod Series CQS Specifications Style Pneumatic (Non-lube) Action Double acting, single rod Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Without auto switch 10C to 70C (No freezing) Ambient & fluid
A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire 24 V Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L
L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches with a "" symbol are produced upon receipt of order.
Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm
Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 15, Stroke(mm): 400, Max.
Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm, Auto Switch: M9B--Solid State , Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)
Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal
Piping: Standard, Bore Size: 15mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)