Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

A 50 bore size is selected.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available. *1 Please consult with SMC for longer strokes.

Rotary Table/Rack & Pinion Style Series MSQ

Size: 10 to 50 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch Hysteresis angle DM9 DA9, DA9V Size Rotating angle Operating angle m 10 10 10 10 Operating angle m 10 10 10 10 B 36 50 66 68 B 40 54 60 72 A 17 23 27 33 A 21 27 31 37 Hysteresis angle 90 80 65 50 60 50 50 40 190 190

Plate Cylinder

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Size 25 32 40 50 63 Part no.

Air Cylinder Series CS1

8 67 70 44 32 4 5 M40 x 1.5 4 x 40 125 94.5 84.5 42.5 CG1 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 40 4 5 115 105 M45 x 1.5 4 x 55 125 180, 200 250 300 42.5 +0.1 0 0.1 0.3 0.080 0.142 50 63 9 86 66 M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63 5 6 178 166 5 x 80 175 105 84.5 IYincludes a pin and 2 cotter pins.

Environment

How to Order R 6N 1 1 D B 25 50 LEY X5 o Made to Order: Dust-tight/ Water-jet-proof q w e r t y u i !0 !1 !2 !

XM, XY

XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 488 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Specifications XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 XMD-25 XYD-25 Model Flange (Valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal

Compact Rotary Actuator Series CRQ2

SU) S BA BA DG AU SF A AA YB effective depth YC 2 YA View (mm) AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 55.4 50 8.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 5 15H9 8 4 3 4.5 13 6.8 11 6.5 70.8 65 10.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5 75.4 70 10.6 29 18.5 14 5 12 50 32 84

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5

58

40 133 341 364 M30 x 1.5 30.5 1/2 98 45 30 1/ 5 stroke 120 346 75 40 141 367 388 M36 x 1.5 34.5 3/4 106 50 25 The minimum stroke with rod boot is 30 mm or more.

Cylinder with Turntable Series MGT

1 MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50

ISO Cylinder

20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5

Cylinder with Lock

100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) (n = 2, 4, 6, 8, ) 20 + 50 (n 2) 2 90 + 50 (n 4) 2 D-B59W (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface 90 15 35 100 100 110 1 Different surfaces Same surface 100 100 110 2 D-A3 D-G39 D-K39

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

surfaces (n = 2, 4, 6, 8, ) Note 1) 20 + 50 (n 2) 2 (n = 4, 8, 12, 16, ) Note 2) 90 + 50 (n 4) 2 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) Note 2) D-B59W n Same surface 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 1 15 90 100 110

Air Cylinder

(n 2) (n 4) 100 + 50 (n 4) 110 + 50 (n 4) 90 + 50 2 2 2 2 Different surfaces (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) O O 75 + 50 (n 2) 90 + 50 (n 2) 100 + 50 (n 2) (n = 2, 4, 6, 8) 110 + 50 (n 2) (n = 2, 4, 6, 8) Same surface (n = 2, 3, 4) (n = 2, 4, 6, 8) 1 10 90 100 110 Different surfaces 20 90 100 110 Same surface 75 Different surfaces 100 + 50

CHKD/CHKG

63 80 100 Note 1) D-A9/A9V models cannot be mounted on 50.

NCM

to 500 mm/sec) Bumber: 2 to 30 inch/sec (50 to 750 mm/sec) Piston Speed Bumper Lubrication Mounting Optional Not required (Food grade pre-lubricated at factory) B, E How to Order B 075 M9NA X6009 C * 02 00 D NC M Auto switch magnet Options X6009 X6009A Nil D No magnet A/S Capable All stainless steel Food grade grease Food grade grease & viton wiper/rod seal Food grade grease & all viton

Rotary Table

Order made parts [g] Size 10 20 30 50 With interchangeable table and interchangeable plate 70 160 120 220 With interchangeable table 30 60 80 130 With interchangeable plate 40 100 40 90 Effective torque 10 50 8 Torque (Nm) 6 30 4 20 2 10 0 0.2 0.4 0.6 0.8 1 Oprating pressure (MPa) -22- Internal construction and parts MSQ10 to 50* 16 10 5 9 15 20 3 23 19 18 6 14 8 7 2 21 1 24 13 22 12 11 17

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.