Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

7

S CAC408 50 50A Flange R 230 VAC G N.O.

AC Servo Motor Driver (CC-Link Type ）

4.0 10.0 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 9 16 10.

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

4.0 10.0 Position loop gain 120 84 120 84 Speed loop gain 3000 4000 3000 4000 Speed integral compensation 20 50 20 50 7 16 8.

10

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

New

The optimum size for a pressure differential of P 0.4 MPa and a flow of 50 L/min will be the VXZ2 3 A (10 orifice, port size 1/4). 500 400 VXZ2 25 Cv = 12 6 D 300 VXZ2 20 Cv = 9.2 5 C 200 VXZ2 15 Cv = 5.3 4 B Flow rate Q [L/min] 100 VXZ2 Port size 3/8 10 Cv = 2.4 VXZ2 Port size 1/4 10 Cv = 1.9 50 3 A 40 3 A 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3 0.4 0.5 Pressure differential P

New

Tightening Torque for Piping Connection thread Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Rc1 1/2 Rc2 Rc2 1/2 Rc3 Proper tightening torque Nm 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 48 to 50 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. 5.

3

For a 10 orifice (VXS23/Port size 1/4), P 0.05 MPa The optimum size for a pressure differential of P 0.2 MPa and a flow of 50 L/min will be the VXS23 (10 orifice, port size 3/8). 500 400 VXS26 25 Cv = 12 300 VXS25 20 Cv = 9.2 200 VXS24 15 Cv = 5.3 Flow rate Q [L/min] 100 VXS23 Port size 3/8 10 Cv = 2.8 VXS23 Port size 1/4 10 Cv = 2.4 50 40 30 25 20 10 0.01 0.02 0.03 0.04 0.05 0.1 0.2 0.3

LECA6_C

LE C A 6 N A (DC24V) (LE ) LESH16RAJ-50BS-R16N1D 6 64 LESH16RAJ-50 I/O N NPN DIN P PNP 1 1.5m D DIN 3 3m 5 5m <> NPNPNP LESH16RAJ-50 NPN NPN 7 - 2.3 1 I/O LEC-CN5-* PLC 1 3 DC24V CN5 CN3 CN4 2 1 () LE-CA-* CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 3 50 200 50 200 3 3 CN1 DC24V <> AWG20 (0.5mm 2) USB A-miniB type USB LEC-W2

Title not found

Protective ON/OFF, 11.5 Power supply with/without load Three phase AC200/200-280V10% (50/60Hz) 5.2 54.8% (50%/50%) Dimensions 700 (450) W x 845D x 1705H ( ): in case single type Conventional type: INR-499 Safety EMI S2, EU EMC directive conformity Circulating fluid gauge, Back flow prevention of circulating fluid, etc.

ZQ-OM01401

(%) [mA] 40 NPN PNP NPN PNP 2 OUT1: OUT2: [mA] 80 [V] 28(NPN ) 26.4(NPN ) [V] 2 (80mA ) [ms] 2.5 (20,100,500,1000,2000ms ) 0.2 (%) F.S. 1digit 1 0 1 0 ( ) 1 to 5V2.5 (%) F.S. 1 (%) F.S. 1k 3 1/2 7 LED () 2 (%) F.S. 1digit (253) ON OUT1: OUT2: IP40 [] -5 to 50 -10 to 60 [%RH] ,35 to 85 [ACV] 1000 1 [M] 50 (DC500V ) 2 (%) F.S. (-5 to 50 25) 2 (AWG26) 5 3.5

LECP6_C

CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.

JXCx-OMT0028CN

200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED, DIN, VALVE

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC

Fluid: air, inert gas, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient and fluid temperature: -10 to 50 C, VALVE, BODY PORTED (DC