Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 m MY1MW40 MY1MW40 (1300) (1300) (1300) 60 60 (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1CW32 MY1CW32 MY1CW32 (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000

Thermo-con/Rack Mount Type

glycol 20% 1800 1800 1600 1600 Ambient temperature 35C 1400 1400 Heating capacity [W] Heating capacity [W] 1200 1200 1000 1000 Ambient temperature 25C 800 800 Ambient temperature 15C 600 600 400 400 Ambient temperature 25C 200 200 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 9 Thermo-con/Rack Mount Type Air-cooled HECR

Slider Type Ball Screw Drive/11-LEFS Series

LEF LEF Lead 6: LEFS25B Lead 6: LEFS25B Lead 12: LEFS25A 25 15 Work load [kg] Work load [kg] Lead 12: LEFS25A 20 Lead 20: LEFS25H LEJ Lead 20: LEFS25H 15 10 A LEL A 10 5 5 LEM 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 LEY Speed [mm/s] Speed [mm/s] LEFS32/Ball Screw Drive LES Horizontal Vertical LEPY LEPS 60 30 Lead 8: LEFS32B Lead 16: LEFS32A Lead 8:

MY1

) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 m MY1MW40 MY1MW40 (1300) (1300) (1300) 60 60 (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1CW32 MY1CW32 MY1CW32 (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

HRX-OM-W002

/1800 1000/1200 1600/1800 2000/2400 2500/3000 Heating capacity(50/60Hz)4 W 400/500 450/500 550/700 Temperature stability 5 0.1 0.13(at 7L/min)/0.18(at 7L/min) Pump capacity (50/60Hz) 6 MPa For option T : 0.42(at 10L/min)/0.4(at 14L/min) 0.13at 7L/min/0.18(at 7L/min) For option MT : 0.32(at 10L/min)/0.32(at 14L/min) For option -T/MT0.36at 7L/min/0.42(at 10L/min) For option T1 : 0.28(at 10L

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

Series IDG

Performance Charts IDG100H P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.7MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate l/min (ANR) Note: F = (1.8 x C) + 32; 1MPa = 145psi; 1l/min = 0.0353SCFM 7 8 Series IDG Membrane Air Dryer Single Style/Standard Dew Point 40C (40F) Specifications How to Order 1l/min = 0.035SCFM IDG 50 L 03 Flow rate by size

Magnetically Coupled Rodless Cylinder

0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] (1 Kg = 2.2 lbs) [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

e

2000 LC6m LC6m 0.5 0.5 LZm LZm LC3F2 LC3F2 0 0 500 1000 0 0 500 1000 Xm Xm Stroke (mm) Stroke (mm) D-m D-m Medium Load (9.80 m/s2) Light Load (19.60 m/s2) 4.0 4.0 E-MY E-MY 300 mm/s 300 mm/s 3.5 3.5 400 400 3.0 3.0 500 500 600 600 2.5 2.5 800 800 Tact time (sec) Tact time (sec) 1000 1000 2.0 2.0 1.5 1.5 1.0 1.0 1600 2000 1600 2000 1200 1200 0.5 0.5 0 0 500 1000 1000 0 0 500 Stroke (mm) Stroke

Electric Actuator Triple Axis P&P Unit

1600 15 7.5 1000 15 5 1600 kg mm/s mm 250 500 250 500 0.05 When axes are combined, select each axis considering the weight of the work piece and the body.

15

0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Table of Contents

IDG100H (Type A products group) P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to pages 14-19-28 to

IDG

IDG100H (Type A products group) P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to pages 14-19-28 to

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0001

/80 1600/80 XLA-63-2 XLA-80-2 AC90240V XL1A25-60S-2 XL1A25-60S-3 1 1 H4 AC100V 400/100 600/150 / AC200V 1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.