Table of Contents

U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 60 Series ZP Replacement Parts: Pad Unit

ZP

U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 60 Series ZP Replacement Parts: Pad Unit

Vacuum

[i15) 1 0 12 26 42 76 a7 5.5 13.85.5 1 8 524.5 44.5 55.5 78.589.5 8.7 1 9 7.5 1 6 1 8 20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16

Vacuum

[i15) 1 0 12 26 42 76 a7 5.5 13.85.5 1 8 524.5 44.5 55.5 78.589.5 8.7 1 9 7.5 1 6 1 8 20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) D16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 -X 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Series 10-SV ® EX500 Decentralized Serial Wiring

D3 For 3 stations D16 For 16 stations Note) For D0, only DIN rail mounting bracket is attached.

ZP

U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16 16 ZP16D 18 4 13 11.7 16 D25 25 ZP25D 28 4 15 15.5 20 D40 40 ZP40D 43 7 18 24.2 29 13-11-59 Series ZP Replacement Parts: Pad Unit (With

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

Basic type / Direct mount type Series CY3B/CY3R

Cylinder tube Hard anodized Aluminum alloy Electroless nickel plated Aluminum alloy 13 36 Insertion guide plate Tube attaching bracket Clear hard anodized Aluminum alloy Stainless steel 14 37 Round head Phillips screw Hexagon socket head cap screw Nickel plated Chrome molybdenum steel Nickel plated Carbon steel 38 15 Magnet Hexagon socket head cap screw Nickel plated Chrome molybdenum steel D16

AC Servo Motor Driver (CC-Link Type)

The right-hand segments of b01, c02 and d16 indicate the axis number.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

The right-hand segments of b01, c02 and d16 indicate the axis number. (Below example indicates Axis1) 1 axis 2 axis 16 axis 4 6 4. STARTUP (2) Indication list Indication Status Description Power of the driver was switched on at the condition that the power of servo system controller is OFF.

AC Servo Motor Driver (CC-Link Type)

The right-hand segments of b01, c02 and d16 indicate the axis number. (Below example indicates Station No.1) Station Station Station No.64 No.1 No.2 -10- (2) Indication list Indication Status Description Power of the CC-Link master module was switched on at the condition that the power of CC-Link master module is OFF.

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

For 3 stations D16 For 16 stations In the case of D0, only DIN rail fittings are attached. Tie-rod base SS5V W 1 A2W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A2W Enclosure IP67 specifications DIN rail length specified Series Standard length Nil 3 SI unit 1 2 SV1000 SV2000 Specify a longer rail than the standard length.

Serial Transmission System Series EX250 Series EX500

D16 For 16 stations Note) In case of D0, only DIN rail fittings are attached. Tie-rod base SS5V W 1 A1W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A1W Enclosure IP67 Series DIN rail length specified 1 2 SV1000 SV2000 Standard length Nil 3 SI unit specification Specify a rail longer than the standard length.

CRBU

auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9) Model 52 64 CRBU2 CDRBU2WU40 0 0.030 4 20 0 0.030 4 CRB1 85 MSU CRJ 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9) Model 52 64 CRBU2 CDRBU2WU40 0 0.030 4 20 0 0.030 4 CRB1 85 MSU CRJ 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

ZP

Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12 C 4 D 13 E 10.7 F 15 Y U40 ZP40U 43 7 13.7 U50 6 7 10 17 D16

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16 14 2031 53 B port A port (145) 2-M5 x 0.8

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25h9 0 0.052 11.5 2-5.5 through 2-M5 x 0.8 through CRA1 10g6 0.005 0.014 20 2 CRQ2 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MSQ 30 2-5.5 through 2-5.5 through 38 38 MRQ 20 3 5 5 D16 14 2031 53 B port A port (145) 2-M5 x 0.8