Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Vacuum Pad

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

Table of Contents

min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR

Compact 5-Port Solenoid Valve

Molded cover L Seal (Length) 2 x M2.6 x 0.45 16 44 8 (2.4) 015 Connector JBZ-25S-3 made by J.S.T. Mfg. Co., Ltd. Connector hood L Terminal no.

Ejector Valve Unit Series ZYY/ZYX 1

min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Max. vacuum pressure: 84 kPa Y3 X3 ZY -10L Max. vacuum pressure: 53 kPa Y3 X3 Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 100 100 100 100 Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

CG5-S

m L (mm) Part no.

CG5-S

m L (mm) Part no.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 25.7 23.3 25.7 23.3 25.7 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

5-Port Solenoid Valve

154.9 157.1 159.4 161.6 163.9 166.1 168.4 170.6 172.9 175.1 177.4 L For the SY5000/7000 Plug-in metal base VZ1000-11-4-l * After confirming the L3 dimension in the dimensions table of each series, refer to the DIN rail dimensions table below and specify the number in the box l.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa : l @ l ., and for the L type it is 33 kPa :' l @' l .'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa ; l = l B, and for the L type it is 47 kPa ;' l =' l B'.

Ejector Valve Unit Series ZYY/ZYX

pressure (kPa) Vacuum pressure -60 30 -60 -60 30 -60 Air consumption Air consumption -40 20 -40 -40 20 -40 Suction flow rate Suction flow rate -20 10 -20 -20 10 -20 0 0 5 10 15 20 25 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S Y3 X3 ZY -10L Y3 X3 Exhaust

Ejector Valve Unit, Series ZYY/ZYX

MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics -100 -100 -100 -100 Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS1001FG AS2001FG AS2051FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of needle rotations AS3001FG AS4001FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8

AS-FG/ASD-FG

min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm Effective area mm Effective area mm 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle revolutions Number of needle revolutions Number of needle revolutions ASD530FG ASD630FG 1500 1000 14 20 12 Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000

Dual Speed Controller with One-touch Fitting Series ASD 1

min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area

ASD

min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,