CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

Compact Cylinder with Lock Series CLQ

0.5 118 157 189 245 302 402 528 628 825 982 1400 1560 2270 2510 3570 3930 0.3 71 94 113 147 181 241 317 377 495 589 841 935 1360 1510 2140 2360 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 25 32 40 50 63 80 100 CLQ-L020 CLQ-F020 CLQ-D020 20 CLQ-L025 CLQ-F025 CLQ-D025 25 CLQ-L032 CLQ-F032 CLQ-D032 CLQ-L040 CLQ-F040 CLQ-D040 32 CLQ-L050 CLQ-F050 CLQ-D050 CLQ-L063 CLQ-F063 CLQ-D063

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

Double clevis Note 2) Foot Note 1) Flange Bore size (mm) 32 40 50 63 RZQ-D032 RZQ-L032 RZQ-F032 RZQ-D040 RZQ-L040 RZQ-F040 RZQ-D050 RZQ-L050 RZQ-F050 RZQ-D063 RZQ-L063 RZQ-F063 Note 1) When ordering foot brackets, order two pieces per cylinder. Note 2) The following parts are included with each mounting bracket.

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Bore size (mm) 20 25 32 40 50 63 80 100 2 foots, 8 mounting bolts Note) 2 Foot CG-L025 CG-L032 CG-L020 CG-L050 CG-L063 CG-L080 CG-L100 CG3-L040 1 flange, 4 mounting bolts 1 clevis, 4 mounting bolts, 1 clevis pin, 2 retaining rings 1 Flange CG-F032 CG-F050 CG-F063 CG-F080 CG-F100 CG3-F020 CG3-F025 CG3-F040 1 Clevis CG-D020 CG-D025 CG-D032 CG-D050 CG-D063 CG-D080 CG-D100 CG3-D040 Pivoting bracket

Compact Cylinder with Air Cushion and Lock Series RLQ

Unit: N Bore size (mm) Operating direction Operating pressure (MPa) Note 3) Note 1) Bore size (mm) Foot Flange Double clevis 0.3 181 241 317 377 495 589 841 935 0.5 302 402 528 628 825 982 1400 1560 0.7 422 563 739 880 1150 1370 1960 2180 32 40 50 63 CLQ-D032 CLQ-D040 CLQ-D050 CLQ-D063 CLQ-F032 CLQ-F040 CLQ-F050 CLQ-F063 CLQ-L032 CLQ-L040 CLQ-L050 CLQ-L063 IN OUT IN OUT IN OUT IN OUT 32 40

3 Position Cylinder Series RZQ

Flange Foot Note 1) Double clevis Note 2) Bore size (mm) 32 40 50 63 RZQ-F032 RZQ-L032 RZQ-D032 RZQ-F040 RZQ-L040 RZQ-D040 RZQ-F050 RZQ-L050 RZQ-D050 RZQ-F063 RZQ-L063 RZQ-D063 Note 1) When ordering foot brackets, order two pieces per cylinder. Note 2) The following parts are included with each mounting bracket.

Compact Cylinder with Lock Series CLQ

CLQ-D025 CLQ-F025 CLQ-L025 A96V A96 A76H IC circuit 5V CLQ-D032 CLQ-F032 CLQ-L032 A72H A72 200V Yes Reed switch CLQ-D040 CLQ-F040 CLQ-L040 Grommet A73H A73 12V 100V CLQ-D050 CLQ-F050 CLQ-L050 A93V A93 Relay, PLC CLQ-D063 CLQ-F063 CLQ-L063 100V or less IC circuit 5V, 12V No A80 A90V A90 A80H 2 wire 24V CLQ-D080 CLQ-F080 CLQ-L080 12V Yes A73C Connector CLQ-D100 CLQ-F100 CLQ-L100 5V,

Compact Cylinder with Air Cushion and Lock Series RLQ

Unit: N Bore size (mm) Operating direction Operating pressure (MPa) Note 3) Note 1) Bore size (mm) Foot Flange Double clevis 0.3 181 241 317 377 495 589 841 935 0.5 302 402 528 628 825 982 1400 1560 0.7 422 563 739 880 1150 1370 1960 2180 CLQ-D032 CLQ-D040 CLQ-D050 CLQ-D063 CLQ-F032 CLQ-F040 CLQ-F050 CLQ-F063 CLQ-L032 CLQ-L040 CLQ-L050 CLQ-L063 32 40 50 63 IN OUT IN OUT IN OUT IN OUT 32 40

3 Position Cylinder Series RZQ

Flange Foot Note 1) Double clevis Note 2) Bore size (mm) 32 40 50 63 RZQ-F032 RZQ-L032 RZQ-D032 RZQ-F040 RZQ-L040 RZQ-D040 RZQ-F050 RZQ-L050 RZQ-D050 RZQ-F063 RZQ-L063 RZQ-D063 Note 1) When ordering foot brackets, order two pieces per cylinder. Note 2) The following parts are included with each mounting bracket.

51

Bore size (mm) 20 25 32 40 50 63 80 100 2 foots, 8 mounting bolts Note) 2 Foot CG-L025 CG-L032 CG-L020 CG3-L040 CG-L050 CG-L063 CG-L080 CG-L100 1 flange, 4 mounting bolts 1 clevis, 4 mounting bolts, 1 clevis pin, 2 retaining rings 1 CG3-F020 CG3-F025 CG3-F040 Flange CG-F032 CG-F050 CG-F063 CG-F080 CG-F100 1 CG-D020 CG-D025 CG-D032 CG3-D040 CG-D050 CG-D063 CG-D080 CG-D100 Clevis Pivoting bracket

RZQ

Flange Foot Note 1) Double clevis Note 2) Bore size (mm) 32 40 50 63 RZQ-F032 RZQ-L032 RZQ-D032 RZQ-F040 RZQ-L040 RZQ-D040 RZQ-F050 RZQ-L050 RZQ-D050 RZQ-F063 RZQ-L063 RZQ-D063 Note 1) When ordering foot brackets, order two pieces per cylinder. Note 2) The following parts are included with each mounting bracket.

CLQ

size (mm) Foot (1) Flange Double clevis 0.3 0.5 0.7 71 94 113 147 181 241 317 377 495 589 841 935 1360 1510 2140 2360 118 157 189 245 302 402 528 628 825 982 1400 1560 2270 2510 3570 3930 165 220 264 344 422 563 739 880 1150 1370 1960 2180 3170 3520 5000 5500 IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT 20 25 32 40 50 63 80 100 CLQ-D020 CLQ-D025 CLQ-D032 CLQ-D040 CLQ-D050 CLQ-D063

RLQ

Bore size (mm) Operating direction Operating pressure (MPa) Note 3) Note 1) Bore size (mm) Foot Flange Double clevis 0.3 181 241 317 377 495 589 841 935 0.5 302 402 528 628 825 982 1400 1560 0.7 422 563 739 880 1150 1370 1960 2180 IN OUT IN OUT IN OUT IN OUT 32 40 50 63 CLQ-D032 CLQ-D040 CLQ-D050 CLQ-D063 CLQ-F032 CLQ-F040 CLQ-F050 CLQ-F063 CLQ-L032 CLQ-L040 CLQ-L050 CLQ-L063 32 40 Note 1

DOC1003077

Mar Q AQ BQ CQ DQ EQ FQ . operation or condition occurs to stop the product and make it safe. This is a function to protect personnel and restrict operation that may cause damage to the product or facility, and to remove dangers related to safety. Apr R AR BR CR DR ER FR . May S AS BS CS DS ES FS .

HEC-OM-Y008

Mar Q yQ ZQ AQ BQ CQ DQ .

PFxx-OMA1007

or P24 short circuit 0: No short circuit 1: Short circuited 1 Air Management Hub internal error 1 Port communication status 0: Device not connected 1: Operate or Pre-operate 2 VP short circuit VP short circuit detection 0: No short circuit 1: Short circuited 3 4 5 Reserved 6 7 Byte 27 and 28 Details Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 Description PQ Dev-Err Dev-Com DSStatus CQ-Short

MWP_E

Rod end deflection accuracy +/-0.1mm or less Non-rotating accuracy of the rod +/-0.3 or less Can be mounted to the installed cylinder Auto switch mounting (In accordance with the applicable switch for the retrospective cylinder) MWPU63 MU base MWPQ125 CQ base -9- 1-2.

2–4

CAT.ES20-179 A Compact Cylinder/Guide Rod Type Lateral Load Resisting 24 times Compared to compact cylinder series CQ Non-rotating accuracy 0.2 or less Refer to page 3 for details. Guide Rod Load can be directly mounted. Load can be directly mounted. External Dimensions Slide bearing Compatible mounting dimensions with the series CQS, CQ2.

Compact Cylinder/Guide Rod Type Series CQM

Series CQM Compact Cylinder/Guide Rod Type Lateral load resisting 2 to 4 times Compared to compact cylinder Series CQ Non-rotating accuracy 0.2 or less CUJ Refer to page 794 for details. CU Guide Rod CQS CQ2 RQ CQM External dimensions Slide bearing Load can be directly mounted. Load can be directly mounted. MU Mounting dimensions compatible with Series CQS, CQ2.

Free Mount Cylinder Series CU

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031