Information

Applicable to DI water (deionized water) piping Variations Cooling capacity (W) Cooling method Power supply International standards Model HRS012 Air-cooled refrigeration Water-cooled refrigeration 1100/1300 (50/60 Hz) Single-phase 100 VAC (50/60 Hz), 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) CE/UL HRS018 1700/1900 (50/60 Hz) HRS024 Single-phase 200 to 230 VAC (50/60 Hz) 2100/2400

Digital Flow Switches

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches, Series PF2A, Series PF2W

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 9 Series PF2A For Air Digital Flow Switch Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line LZ 200 W /l60 (Motor rotation speed) (3750 rpm) (2400 rpm) LC3F2 A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l Motor mounting position: Top/Parallel, In-line 400 W /l60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm

Electric Actuator/Slider Type

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W / 60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 400 W / 60 Motor mounting position: Top/Parallel, In-line (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86 70 (Motor rotation speed) (1470 rpm) 70 Series

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

15

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63l 400 W equivalent (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L 2.86* 70 (Motor rotation speed) (1470 rpm) * Equivalent lead which includes the screw lead

Environment

rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed) (3000 rpm) (2400 rpm) (1800 rpm) (1500 rpm) L* 2.86 70 (Motor rotation speed) (1470 rpm) * Top/Parallel

Table of Contents

Select the communication speed from 1200, 2400, 4800, 9600 or 19200 with the UP/DOWN keys. Store the setting with the SET key. The SEL. key only shifts the cursor without storing the setting. UP J DOWN DFUNC. FUNC. SEL. key 3-8 -X Unit no. 20Data The unit number registration mode is selected by pressing the SEL. key while UNIT is flashing.

The CLS series cylinder with lock is ideal for applications requiring intermediate and emergency stop and drop prevention. The compact lock unit is lightweight and saves space. A switch is optional on the brake cylinder so the operating state of the lock unit (brake piston) can be detected using the switch signal. By separating the lock mechanism and the brake cylinder, SMC has minimized

Magnet: None, Mounting: G (Rear Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: TN (NPT), Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: None, Mounting: G (Rear Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: TN (NPT), Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch)

Magnet: None, Mounting: G (Rear Flange), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: TN (NPT), Stroke: 1000mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch

Magnet: None, Mounting: Rear Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: NPT, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Lock Unit

Magnet: None, Mounting: Rear Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: NPT, Stroke: 600mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Lock Unit

Magnet: None, Mounting: Rear Flange, Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 250mm, Thread: NPT, Stroke: 1000mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Lock Unit

HRX-OM-W002

R410A(HFC) Quantity of refrigerant Kg 0.36 0.36 0.38 0.38 0.47 0.47 Control method PID control Ambient temperature andhumidity and altitude 1 Temperature:5 to 40,Humidity:30 to 70%,Altitude: Less than 3000m Circulating fluid2 Tap water, Ethylene glycol aqueous solution 15% Operating temperature range1 5 to 3520 Cooling capacity(50/60Hz) 3 W 1000/1200 1600/1800 1000/1200 1600/1800 2000/2400

A-HEC-OM-J004

-232C SG 6-9 Unused Unused Communication connector D-sub 9 pin (female) 7.3 Specifications of Connectors 7-7 A_HEC-OM-J004-4 Chapter 7 Appendix 7.4 Communication 7.4.1 Specifications Table 7-2 Communication Communication type HEBC002-WA10 HEBC002-WB10 Protocol RS-485 RS-232C Circuit type Half duplex Half duplex Communication type Asynchronous Asynchronous Communication speed (BPS) 1200/2400

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.