Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Specification: Without magnet, Auto Switches: Without

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Low Speed, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Specification: Without magnet, Auto Switches: Without

1

(Pitch) P = 19 (11) 1/4 [4(A), 2(B) port] Applicable tube O.D.: 6 ,1/4" : 8, 5/16" : 10, 3/8" : 12 (22.9) (For 12) 2 3 4 5 6 7 8 9 10 11 12 n: Stations L1 92 111 130 149 168 187 206 225 244 263 282 L2 82 101 120 139 158 177 196 215 234 253 272 L3 123 148 160.5 185.5 198 223 235.5 260.5 273 298 310.5 L4 112.5 137.5 150 175 187.5 212.5 225 250 262.5 287.5 300 L5 15.5 18.5 15.5 18.5 15 18 15

Table of Contents

st or less Over 275 st Over 75 st to 175 st Over 175 st to 275 st 20 3 3.5 30 81 54 72 44 44 120 200 300 39 77 117 167 28 25 4 4.5 38 91 64 82 50 44 120 200 300 39 77 117 167 34 MGPM (Slide bearing) A, DB, E Dimensions End Lock Mechanism Dimensions A DB E Bore size (mm) Bore size (mm) DL DM HR HN 25 st or less Over 175 st 250 st Over 25 st to 175 st 25 st or less Over 175 st 250 st Over

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VQZ SQ (Station 1) (Station n) VFS (Light/surge voltage suppressor) VFR 63.3 VQ7 47.9 45.9 40.9 34.5 7.5 Block separation button (Push type) 15 14 13 12 11 10 9 8 7 6 5 4 3 2 stations 16 stations Stations n L1 285.5 273 260.5 260.5 248 235.5 223 210.5 198 185.5 185.5 148 173 298 160.5 L2 275 262.5 250 250 237.5 225 212.5 200 187.5 175 175 137.5 162.5 287.5 150 L3 223.5 213 202.5 192 181.5

Air Cylinder Series MB

ML1C Bore size (mm) Standard stroke (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400,

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 148 137.5 112.5 17.5 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 210.5 200 175.5 17.5 210.5 200 186 12 223 212.5 196.5 13 SS5Y3-45T1UStations B-Q (18 pins) C4 C6 Stations n L1 L2 L3 L4 2 160.5 150 129 15.5 3 4 5 6 7 8 9 173 162.5 139.5 16.5 185.5 175 150 17.5 185.5 175 160.5 12.5 198 187.5 171

Electric Actuators

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Compact Cylinder

For details, refer to page 175.

MG

st or less Over 275 st Over 75 st to 175 st Over 175 st to 275 st 20 3 3.5 30 81 54 72 44 44 120 200 300 39 77 117 167 28 25 4 4.5 38 91 64 82 50 44 120 200 300 39 77 117 167 34 MGPM (Slide bearing) A, DB, E Dimensions End Lock Mechanism Dimensions A DB E Bore size (mm) Bore size (mm) DL DM HR HN 25 st or less Over 175 st 250 st Over 25 st to 175 st 25 st or less Over 175 st 250 st Over

SY

C4 C6 2 123 112.5 91.5 15.5 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 210.5 200 175.5 17.5 198 187.5 165 16.5 185.5 175 154.5 15.5 173 162.5 144 14.5 160.5 150 133.5 13.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45FDStations B-C4 C6 Type 45 Stations n L1 L2 4 3 2 160.5 150 148 137.5 173 162.5 185.5 175 185.5 175 198 187.5 210.5 200 223 212.5 129 118.5 139.5 150 160.5

LX

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

LX

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

Table of Contents

Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 234 27 Courtesy of Steven Engineering, Inc.-230

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

24

[mm] Bore size [mm] A DB E Bore size [mm] A DB E 25 st or less Over 25 st to 175 st Over 175 st 25 st or less Over 25 st to 175 st Over 175 st 20 78 84.5 122 12 0 6.5 44 25 78.5 85 122 16 0 6.5 43.5 75 st or less Over 75 st to 175 st Over 175 st 75 st or less Over 75 st to 175 st Over 175 st 20 80 104 122 10 2 26 44 25 85.5 104.5 122 13 7 26 43.5 End Lock Mechanism Dimensions [mm] Bore size

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4