Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

Electric Actuator

3.28 3.28 200 3.66 3.66 30 3.68 3.59 50 4.10 4.01 100 4.80 4.72 150 5.73 5.64 200 6.48 6.39 250 7.23 7.14 300 7.80 7.72 30 6.42 50 6.99 100 8.20 150 9.44 200 10.9 250 12.0 300 13.0 Step motor Servo motor Product weight [lb] LEYG16L LEYG25L LEYG32L Stroke [mm] Model 30 1.85 1.85 50 2.14 2.14 100 2.51 2.51 150 3.15 3.15 200 3.48 3.48 30 3.70 3.62 50 4.17 4.08 100 4.63 4.61 150 5.64

10

125 150 89 102 114 127 152 177 202 227 63 64 51 25 12.5 25 37.5 50 75 100 125 150 89 102 114 127 152 177 202 227 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 101 114 126 139 164 189 214 239 264 289 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 120 130 140 150 170 190 210 230

Mechanically Jointed Rodless Cylinder Series MY1

Wn X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 65 mm 0 mm 5 mm Y Wb 4.35 kg 150 mm 0 mm 42.5 mm Wc 0.795 kg 150 mm 111 mm 42.5 mm X 65 150 Wd 0.5 kg 150 mm 210 mm 42.5 mm n=a, b, c, d 3.

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Cylinder with Turntable Series MGT

Note 4) 1 m (M): D-M9(W)(V) only Model Lead wire length D-LC05 0.5 m D-LC30 3 m D-LC50 5 m Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m 90 mm 3 m 150 mm 5 m 1728 Solid State Auto Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to SMC website for the details of the products conforming to the international standards.

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

0.5 MPa 0.5 MPa 6 MHY 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 0.35 MPa 100 0.35 MPa 4 0.3 MPa 0.3 MPa MHW 50 2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Parallel Style Air Gripper Series MHZ

0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 100 L MHZ 0.2 MPa 5 50 MHF 0 10 20 30 40 50 0 50 100 150 MHL Gripping point L (mm) Gripping point L (mm) MHZ2-16D/MHZL2-16D MHR MHZ2-40D 400 Pressure 0.7 MPa MHK Pressure 0.7 MPa 50 350 0.6 MPa 0.6 MPa 300 Gripping force (N) MHS 40 0.5 MPa 0.5 MPa 250 0.4 MPa 0.4 MPa 30 MHC 200 0.3 MPa 0.3 MPa 20 150 0.2 MPa MHT 0.2 MPa 100 10 50 MHY 0 10 20 30

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Air Slide Table

40 ST 150 ST 150 0.400 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.020 ST 50, 75 0.350 0.015 ST 100 ST 125 ST 125 0.300 ST 10 to 100 0.015 ST 40, 50, 75 0.250 ST 125 ST 100 0.010 0.200 ST 100 0.010 0.150 ST 10 to 50 ST 125, 150 ST 10 to 30 0.005 ST 75 ST 150 0.100 0.005 0.050 0.000 0.000 0.000 0 50 100 0 50 100 0 50 100 Load [N] Load [N] Load [N] ST = Stroke

e-Rodless Actuator

(Wn) Weight (mn) Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 5 mm 0.88 kg 0 mm 65 mm 111 Wb 42.5 mm 4.35 kg 0 mm 150 mm Y 210 Y Wc 42.5 mm 0.795 kg 111 mm 150 mm Wd 42.5 mm 1.0 kg 210 mm 150 mm n = a, b, c, d 3 Calculation of composite center of gravity m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg 1 m3 X = x (mn x xn) 1 7.025 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 1.0 x 150) = 139.4 mm 1

24

124 M14 x 2.0 28 11 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 150 st or less Over 150 st 150 st or less Over 150 st 80 146.5 193 30 0 46.5 100 166 203 36 0 37 150 st or less Over 150 st 150 st or less Over 150 st 80 160 193 25 13.5 46.5 100 180 203 30 14 37 End

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 68 56 30

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

kg 250 Load weight m (kg) 200 63 150 Since the conditions are vertical upward mounting with a speed of 500 mm/s, use graph (2).

48

300 250 250 Overhang: L6 [mm] Overhang: L6 [mm] 500 mm stroke or less 200 200 600 mm stroke or less m L6 150 150 100 100 600 mm stroke 50 50 0 0 Work load [lb] 0 2.2 4.4 6.6 8.8 11 Work load [lb] 0 2.2 4.4 6.6 8.8 11 2 Series LEL These graphs show the allowable value for the actuator alone.

CQS

175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12