Magnet: Built-in, Mounting: Basic, Bore Size: 25mm, Stroke: 30mm, Rod End Nut: Male Thread, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 5, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 15, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 20, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 20, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 25, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 25, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 30, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 35, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 35, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 40, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 40, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 45, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.3～13, Tube Material: Aluminum, Piston Speed(mm/sec): 8～100, Piston Packing Material: NBR, Stroke(mm): 50, Cushioning Mechanism: N/A, Operating Temperature Range(°C): -10～80, Support Type: Retainer Pin/Stopper Set, Standard: JIS Specifications, Nominal Pressure: 10MPa

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Free Mount Cylinder

1 pc. 10 5 10 2 pcs.

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution