Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 15mm, Rod End Nut: M (Male Thread)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 35mm

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 30mm, Rod End Nut: M (Male Thread)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 35mm, Rod End Nut: M (Male Thread)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 45mm

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 45mm, Rod End Nut: M (Male Thread)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 50mm, Rod End Nut: M (Male Thread)

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 10mm

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 15mm

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 30mm

Magnet: D (Built-in), Mounting: B (Basic), Bore Size: 20mm, Stroke: 40mm

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COM. () 20 COM.

Table of Contents

SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Table of Contents

20 20 1.

Air Cylinder

[mm] Bore size A BA BB CA CB F FB FC FT FX FY FZ GA H KA MM NA NB NN 10 15 15 12 17 14 8 17.5 5.5 2.3 33 20 42 8 28 4.2 M4 x 0.7 12.5 4.8 M10 x 1.0 16 15 18.3 18.3 20 20 8 19 5.5 2.3 33 20 42 8 28 5.2 M5 x 0.8 12.5 4.8 M12 x 1.0 Bore size S Z D5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st

ISO Cylinder

GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Table of Contents

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.