D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310
105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 7 x 120l x 125l x 130l x 135l x 160l x 185l x 80l x 85l x 90l x 95l x 100l 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32
Auto switch type Model Features Electrical entry (Fetching direction) D-A90V Without indicator light Grommet (Perpendicular) D-A93V, A96V D-Z73, Z76 Reed D-A53, A56 Grommet (In-line) D-A64, A67 Without indicator light D-Z80 D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV Grommet (Perpendicular) D-M9NWV, M9PWV, M9BWV 2-color indication D-Y7NWV, Y7PWV, Y7BWV D-M9NAVL, M9PAVL, M9BAVL Water resistant (
Model Features Electrical entry D-A93V, A96V Grommet (Perpendicular) Without indicator light D-A90V Reed D-A53, A56, B53, Z73, Z76 Grommet (In-line) Without indicator light D-A67, Z80 D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV D-M9NWV, M9PWV, M9BWV Grommet (Perpendicular) Diagnostic indication (2-color indication) D-Y7NWV, Y7PWV, Y7BWV Water resistant (2-color indication) D-M9NAVL, M9PAVL, M9BAVL
Model Features Electrical entry (Fetching direction) D-A90V Without indicator light Grommet (Perpendicular) D-A93V, A96V D-Z73, Z76 Reed D-A53, A56 Grommet (In-line) D-A64, A67 Without indicator light D-Z80 D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV Grommet (Perpendicular) D-M9NWV, M9PWV, M9BWV 2-color indication D-Y7NWV, Y7PWV, Y7BWV Water resistant (2-color indication) D-M9NAVL, M9PAVL, M9BAVL
entry (Fetching direction) D-A93V, A96V Grommet (Perpendicular) D-A90V Without indicator light Reed auto switch D-A53, A56, B53, Z73, Z76 Grommet (In-line) D-A67, Z80 Without indicator light D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV D-M9NWV, M9PWV, M9BWV Grommet (Perpendicular) Diagnostic indication (2-color) D-Y7NWV, Y7PWV, Y7BWV Water resistant (2-color indication) D-M9NAVL, M9PAVL, M9BAVL
Model Features Electrical entry (Direction) Without indicator light Type D-A90V D-A93V, A96V D-Z73, Z76 D-A53, A56 D-A67 D-Z80 D-F59, F5P, J59 D-Y59A, Y59B, Y7P D-F59W, F5PW, J59W D-Y7NW, Y7PW, Y7BW D-F5BAL, Y7BAL D-F5NTL D-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV D-M9NWV, M9PWV, M9BWV D-Y7NWV, Y7PWV, Y7BWV D-M9NAVL, M9PAVL, M9BAVL Grommet (Perpendicular) Reed auto switch Grommet (in-line) Without
indicator light D-Z80 D-F59, F5P, J59 D-Y59A, Y59B, Y7P D-F59W, F5PW, J59W Grommet (in-line) 2-color display D-Y7NW, Y7PW, Y7BW Water resistant (2 colors) D-F5BAL, Y7BAL With timer Solid state D-F5NTL DD-M9NV, M9PV, M9BV D-Y69A, Y69B, Y7PV -X Grommet (perpendicular) D-M9NWV, M9PWV, M9BWV 2-color display D-Y7NWV, Y7PWV, Y7BWV Individual -X Water resistant (2 colors) D-M9NAVL, M9PAVL, M9BAVL
M9BAVL ~ Wrth pre-wired connector IS available for solid state auto switcnes For details. refer to BeSl Pooumatics No.2. .. Normally closed (NC., b contaCl). solid slate sWItches (OF9G F9H, Y7G, Y7H type) are also ajallable.
Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
x 140L Mounting bolt size M5 x 65L x 70L x 75L x 85L x 95L x 120L x 145L M6 x 85L x 95L x 105L x 130L x 155L M8 x 90L x 100L x 110L x 135L x 160L M10 x 105L x 115L x 140L x 165L M10 x 120L x 130L x 155L x 180L R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -
Mounting bolt M3 x 45L M3 x 55L M3 x 60L M5 x 55L M5 x 60L M5 x 65L M5 x 60L M5 x 65L M5 x 70L Mounting bolt M5 x 75L M5 x 80L M5 x 85L M6 x 75L M6 x 80L M6 x 85L RSQB12-10 Note) RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 7 9 Mounting bolt C D 9 Note) When using the through-hole mounting for a size 12 cylinder, be sure to use the flat washer which
Mounting bolt Mounting bolt diagram C D Mounting bolts D Model C Mounting bolt Model C D Mounting bolt M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l CHQWB63 10D (M) CHQWB20 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 70l x 80l x 85l x 90l x 95l x 100l
Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes
Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes