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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

High Vacuum Slit Valve

Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,

Parallel Seal Type Slit Valve

Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 10mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 20mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 40mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 50mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 25mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 30mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in Magnet), Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 15mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: D (Built-in), Bore Size: 10 mm, Port Thread: M5x0.8; Rc1/8 for ø32, Stroke: 60 mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Magnet: D (Built-in Magnet), Bore Size: 10 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 10 mm, Action: T (Single Acting Spring Extend), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M

Magnet: Built-in Magnet, Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 50mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 25mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Bore Size: 10, Port Thread: Bore: 6, 10, 16, 20, 25, M5x0.8 ; Bore: ø32, Rc1/8, Stroke: 30mm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in Magnet, Bore Size: 10 mm, Port Thread: Bores 6~25: M5, Bore 32: Rc 1/8, Stroke: 10 mm, Action: Single Acting Spring Extend, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire or Prewired Connector: -, Number: -

, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: A93

, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: A93

, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: A93