15

300 200 Lead 8: LEY32DB 200 100 Lead 16: LEY32DA 100 Lead 20: LEY32A 0 60 30 120 90 0 60 30 120 90 Ratio to rated torque [%] Ratio to rated torque [%] * When using the force control or speed control, set the maximum value to be no more than 90% of the rated torque.

Air Cylinder

Locking type manual release While pushing the M/O knob, turn it 90 counterclockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob. When locking is desired, turn the M/O knob 90 clockwise while pushing completely down, and align the mark on the cap with the ON mark on the M/O knob.

High Vacuum Angle Valve

5 XLAV16-90-2 (XLAV63-90-1 only for XLFV-50-2) XLAV63-90-1 * The -mm at the end of the solenoid valve part number is the selection symbol for voltage, electrical entry, and other specifications.

Rotary Table/Rack & Pinion Style Series MSQ

Rotation 90 Rotation 90 Rotation 278 Rotary Table/Rack & Pinion Style Series MSQ Construction CRB2 CRBU2 CRB1 MSU CRJ o i t !

Integrated Controller

)[88]4 13 (86) 86 (175.8) 88[(90)]4 Communication cable connector (M12) Origin end3 [Opposite end]4 Opposite end [Origin end]4 2[(4)]4 (90) Parallel I/O connector (M12) 61 (4)[2]4 27.8 20.1 68 8 31 Power supply connector (M12) 39.3 22 Auto switch groove (1 row per side) M4 x 0.7 thread depth 8 (F.G. terminal) 8 53.8 68 Motor option: With lock (220.8) (16) D x 150 (=E) B + Stroke 15 60 150

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

Cylinder with Turntable Series MGT

Note 4) 1 m (M): D-M9(W)(V) only Model Lead wire length D-LC05 0.5 m D-LC30 3 m D-LC50 5 m Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m 90 mm 3 m 150 mm 5 m 1728 Solid State Auto Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to SMC website for the details of the products conforming to the international standards.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.

NCM

Weight Unit: g Caution Precautions D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Fix the switch with appropriate screw installed on the switch body.

Mechanically Jointed Rodless Cylinder Series MY1

30 60 40 122 25 140 28 MY1B 80 15 22 53 660 61 15 90 690 38 120 40 70 48 155 28 176 35 MY1B100 20 42 69 760 75 20 120 800 Y 2 x d R WX D Bottom ported (Applicable O-ring) Hole Size for Centralized Piping on the Bottom WX Y d D R Applicable O-ring Model 90 45 18 26 1.8 MY1B 80 120 50 18 26 1.8 MY1B100 P22 (Machine the mounting side to the dimensions below.) 968 Series MY1B Mechanically Jointed

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

XM, XY

A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Auto Switch Guide

RS Q G RS H A Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) RZQ D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model MI W S 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 CEP1 OUT Black 68 68 63 5 CE1 Dimensions DC () Blue D-M9V D-M9 CE2 M2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV Indicator light

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

CLS CLQ Auto Switch Internal Circuit D-M9N, D-M9NV Weight (g) MLGP D-M9N(V) D-M9P(V) D-M9B(V) DC (+) Brown Auto switch model RLQ 8 8 7 0.5 Lead wire length (m) Main circuit of switch Main circuit of switch Main circuit of switch 41 41 38 3 MLU OUT Black 68 68 63 5 ML1C Dimensions DC () Blue D-M9V D-M9 DM2.5 x 4l slotted set screw 500 (3000) (5000) D-M9P, D-M9PV M2.5 x 4l Slotted set screw

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Electric Actuator

Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 10 30 50 10 30 50 310, 180, 90 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-78 Gripper Step Motor (Servo/24 VDC) Series LEHF S Type (3 Fingers) Z Type (2 Fingers) With Dust Cover F Type (2 Fingers) Series LEHZ Series LEHZJ Series LEHS Opening

10

Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70 75 80 85 90 D-F5l/J59 D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 90 95 110 115 120 130 n (Same surface) 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110