Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB12-5DC -10DC

Rotary Gripper Series MRHQ

Model (1) Cylinder bore (mm) Opening/Closing stroke (mm) Rotating angle () Mass (g) Action Model 306 90 MRHQ10D 10 4 305 180 593 90 MRHQ16D 16 6 591 180 Double acting 1055 90 MRHQ20D 20 10 1052 180 1561 90 MRHQ25D 25 14 1555 180 MRHQ10S MRHQ10C 307 90 10 4 306 180 MRHQ16S MRHQ16C 594 90 16 6 592 180 Single acting 1060 90 MRHQ20S MRHQ20C 20 10 1057 180 1566 90 MRHQ25S MRHQ25C 25 14 1560 180

15

300 200 Lead 8: LEY32DB 200 100 Lead 16: LEY32DA 100 Lead 20: LEY32A 0 60 30 120 90 0 60 30 120 90 Ratio to rated torque [%] Ratio to rated torque [%] * When using the force control or speed control, set the maximum value to be no more than 90% of the rated torque.

Air Cylinder

Locking type manual release While pushing the M/O knob, turn it 90 counterclockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob. When locking is desired, turn the M/O knob 90 clockwise while pushing completely down, and align the mark on the cap with the ON mark on the M/O knob.

Magnetically Coupled Rodless Cylinder

D-M9N D-M9B D-M9P Auto switch part no.

NCM

NCDMB075-0400-M9B-X169US NCDMB(075 to 200)Stroke (C)-X169US ZB + STROKE W B-DIA.

Integrated Controller

)[88]4 13 (86) 86 (175.8) 88[(90)]4 Communication cable connector (M12) Origin end3 [Opposite end]4 Opposite end [Origin end]4 2[(4)]4 (90) Parallel I/O connector (M12) 61 (4)[2]4 27.8 20.1 68 8 31 Power supply connector (M12) 39.3 22 Auto switch groove (1 row per side) M4 x 0.7 thread depth 8 (F.G. terminal) 8 53.8 68 Motor option: With lock (220.8) (16) D x 150 (=E) B + Stroke 15 60 150

High Vacuum Angle Valve

5 XLAV16-90-2 (XLAV63-90-1 only for XLFV-50-2) XLAV63-90-1 * The -mm at the end of the solenoid valve part number is the selection symbol for voltage, electrical entry, and other specifications.

Compact Cylinder

85 90 95 55 60 65 70 75 80 85 90 95 100 110 130 150 10.2 13 8.4 Fix the cylinder by using the OA thread that are provided with the cylinder tube.

Cylinder with Turntable Series MGT

Note 4) 1 m (M): D-M9(W)(V) only Model Lead wire length D-LC05 0.5 m D-LC30 3 m D-LC50 5 m Lead wire length Tolerance 15 mm 0.5 m 30 mm 1 m 90 mm 3 m 150 mm 5 m 1728 Solid State Auto Switch Direct Mounting Style D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to SMC website for the details of the products conforming to the international standards.

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

Electric Actuator

Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 10 30 50 10 30 50 310, 180, 90 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-78 Gripper Step Motor (Servo/24 VDC) Series LEHF S Type (3 Fingers) Z Type (2 Fingers) With Dust Cover F Type (2 Fingers) Series LEHZ Series LEHZJ Series LEHS Opening

10

Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70 75 80 85 90 D-F5l/J59 D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 90 95 110 115 120 130 n (Same surface) 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Cylinder with Lock Series CLS

59 16 107 58 110 M14 x 1.5 15 65 19 Up to 1000 3 30 14 47 78 43 31 50 161 18 110 146 1/4 128 28 17 36 36 90 59 16 114 64 110 M14 x 1.5 15 75 19 Up to 1200 5 46 14 56 53 182 95 23 132 169 1/4 144 32 20 40 40 90 59 43 18.5 130 74 120 17 36 80 22 M16 x 1.5 +0.100 0 Up to 1200 118 30 16 5 63 60 204 106 36 167 195 3/8 162 40 23 50 45 115 70 48 17 18.5 149 86 135 20 41 90 26 M18 x 1.5 +0.100

Compact Cylinder

95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 45 50 55 60 65 70 75 80 85 90 M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l Courtesy of Steven Engineering

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

MLGP Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL RLQ MLU ML1C Auto Switch Mounting Bracket Part No.