Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.25 to 1.0, Specification: Built-in magnet, Body Options
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.25 to 1.0, Specification: Built-in magnet, Body Options
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.25 to 1.0, Specification: Built-in magnet, Body Options
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 10, Cylinder Operation Method: Single Acting, Spring Return, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: High rigidity / high precision high class guide, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.25 to 1.0, Specification: Built-in magnet, Body Options
Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4., 5. 6. ,, 2 - / 1 1.5 () [] 3 - 1. 50mm336mm -6 Pa 10 MPa 0.450.6 -10 Pam 3/sec O :FKM 6.510 O :Kalrez R 4079 6.510 -9 Pam 3/sec -8 Pam 3/sec O :FKM 6.510 0.1MPa(abs) O :Kalrez R 4079 6.510 -7 Pam 3/sec -11 Pam 3/sec 6.510 5150() 560() s 0.61 *2 (D-A93
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,
Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
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Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 10mm, Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 100mm, Option: C (Rubber Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 100mm, Option: CM (Rubber Bumper,Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 15mm, Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 20mm, Option: C (Rubber Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 20mm, Option: CM (Rubber Bumper,Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 25mm, Option: Standard (Rod End Female Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 30mm, Option: M (Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 40mm, Option: CM (Rubber Bumper,Rod End Male Thread), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m
Magnet: D (Built-in), Mounting: B (Through Hole, Both Ends Tapped), Bore Size: 12mm, Stroke: 50mm, Option: C (Rubber Bumper), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5m