CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

1 e !4 Order 1 piece finger assembly per one unit.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

9@0 MHY2-D MHY2-D2 MHY-A1001 MHY-A1601 MHY-A2001 MHY-A2501 Finger assembly ro MHY-A1001-2 MHY-A1601-2 MHY-A2001-2 MHY-A2501-2 <10, 16> e!2 Joint assembly MHY-A1002 MHY-A1602 MHY-A2002 MHY-A2502 <20, 25> e!2!

Compact Cylinder

2 y q e !3 o !0 With auto switch (Built-in magnet) 32 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 r t i !4 y q e !3 o w u !0 !1 M: Rod end male thread Component Parts Replacement Parts: Seal Kit No. Description Material Note Bore size (mm) Kit no.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Left flange surface Rear flange surface Right flange surface Right flange surface Left flange surface With indicator E H V I G L H A V V M A U C U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

MHK2

9 wyu e r i MH-A1006 MHKL2-J25 MHKL2-J25F MHKL2-J25S Order 2 pieces per one finger unit.

MHK2

4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

CRJ

Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) F9NWZ 11-6-5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

L (Example) M9NL 5 m . Z (Example) M9NZ PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list. 799 MXQ 1322Air Slide Table Specifications 6 8 12 16 20 25 Bore size (mm) Fluid Air Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

9 #4 #5 #1 MY CY @7 @8 t @9 @4 @4 @4 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DMetal stopper Shock absorber e !8 A -X i !1 !0 @6 o @0 20Data !3 !4 !5 !6 !2 @2 @1 Detail drawing of part A Component Parts Note Note Material Material No.

MHC2-6/MHCA2-6

Option Body Option/End Boss Type Single acting Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 MHZ Symbol Piping port location Applicable model Double acting Single acting Basic type Side ported MHF Nil E K H M MHL Axial ported MHR Made to Order Refer to pages 683 to 713 for details.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Indicator light Yes Applicable model Load voltage Type Special function Electrical entry Wiring (Output) 0.5 Nil 3 (L) 5 Note 2) DC Perpendicular 10 16 20 25 In-line AC (Z) M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B 3-wire (NPN) Solid state auto switch 5 V 12 V IC circuit Relay PLC 3-wire (PNP) 24 V Grommet 2-wire 12 V Note 1) Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

MHR2/MDHR2

With magnet (For auto switch) Number of auto switches 2 Nil S Number of fingers 2 pcs. 1 pc. 2 fingers Nominal size 10 15 20 30 MHZ Connecting port MHF R: Body side E: Axial side MHL Port Port MHR MHK MHS MHC MHT Applicable Auto Switch/Refer to pages 761 to 809 for further information on auto switches.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

NIL S Nominal size 10 15 Connecting port E: Axial side R: Body side Port Port Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Type: Standard, Bore Size: 100mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 75mm, Body Option: Standard (Rod End Female Thread, Without thread on 4mm bore), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: M9N--Solid State , Gen. Purpose, 3 Wire