Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushion, Specification: Built-in magnet, Port thread type: G, Auto

Magnet: Built-in, Type: Pneumatic, Mounting: Single Clevis, Bore: 25mm, Port Thread: G, Stroke: 50mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

Magnet: Built-in, Type: Pneumatic, Mounting: Single Clevis, Bore: 25mm, Port Thread: G, Stroke: 75mm, Cushion: Air Cushion, Rod End Thread: Male Rod End, Rod Boot: None, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -

15

Motor Mounting: In-line Motor Mounting Diagram Motor type: NZ, NY, NX, NW, NV, NU, NT, NM2 Motor type: NZ, NY, NW, NU, NT [Included parts] Hexagon socket head cap screw/MM (Tightening torque: TT [Nm]) Motor [Provided by user] Motor flange PD Motor side hub Motor flange Motor mounting screw Motor Mounting dimension: FP Motor mounting screw [Provided by user] [Included parts] Motor side hub

High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

Table of Contents

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

Modular F.R.L. Units

Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting

Mechanically Jointed Rodless Cylinder Series MY1

( * * % # NW A GB N Z & ' ( . WW WW /*#! ( * * % # . . . 0 0 /*#! ( * * % # XX XX Centralized piping type Centralized piping type VV VV . . /*#! ( * * % # /*#!

2

Example) AC30D-F03DM-SV-1NR-A r t y w Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc V V V N NPT V V V F G V V V + 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V + Ne Port size Nil Without auto drain V V V C Note 2) N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D Note 3) N.O.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Aluminum High Vacuum Angle Valve

Stainless steel 432 Made to Order XLF Series How to Order Valve 100 XLFR M9N A 1K X Flange type Symbol Nil KF(NW) K(DN) D Temperature specifications Symbol Nil 5 to 60C 5 to 150C H0 Seal material Symbol Nil FKM EPDM Barrel Perfluoro Type Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

MY1

MY1B16/20 Stroke (LL) L PA 2 x 2-B counterbore depth C LD through-hole 4-MM depth M YW QW NW PB PG Q + Stroke Floating bracket mounting thread (2-JJ thread depth from bottom of counter bore KK) PC 1 LW M5 x 0.8 (Port) 2-T counterbore depth E M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

XL

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

High Vacuum Angle Valve, XL Series

Valve closed 40 50 63 80 Auto switch type Nil Without auto switch (without built-in magnet) F9N Solid state auto switches F9P D-F9N D-F9P Flange type F9B D-F9B Symbol Type Applicable flange size Nil D KF(NW) K(DN) 16, 25, 40, 50, 63, 80 63, 80 Note 1) The standard lead wire length is 0.5m. For 3m, "L" is added at the end of the part number.

MY1

stopper bolt) 5 (Max. 10) 1.8 10 5 28 5.5 35 40.8 (Shock absorber stroke) 5 Stroke adjusting unit 15.4 8 Shock absorber (RB0805) 13.5 3.5 2.8 Work piece SMC 29.8 11 Series MY1B Mechanically Jointed Rodless Cylinder Standard Type / Dimensions (mm) 16 to 40 MY1B Bore size Stroke 1 in = 25.4 mm (LL) L 4-B depth of counter bore C LD through hole bottom side J depth K PA 4-MM depth M YW QW NW

1

Mounting bracket Bore size (mm) 6 10 16 Foot CJ-L006B CJ-L010C CJ-L016C Ordering Example of Cylinder Assembly Flange CJ-F006B CJ-F010C CJ-F016C T-bracket* CJ-T010C CJ-T016C Cylinder model: CDJ2D16-45SZ-NW-M9BW-B * T-bracket is used with double clevis (D).

High Vacuum Angle Valve

air (Bellows balance) 2 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW

XMC/XYC Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) ,CF KF(NW),K(D N) XYC KF(NW) KF(NW) KF(NW) KF(NW) K(DN) KF(NW) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa (G) 0.3 to 0.6 0.4 to 0.6 Air consumption cm3 Note 3 At 0.5MPa 38 91 430 280 500 1000 Port size M5 Rc 1/8 XMC 0.36 (0.40) 0.62 1.40(1.76) 2.10 3.80

XMA/XYA Series

),CF KF(NW) KF(NW),CF KF(NW) KF(NW),K(DN) KF(NW), K(DN) ,CF XYA KF(NW) KF(NW) KF(NW) KF(NW) KF(NW) K(DN) K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Actuation pressure MPa(G) 0.4 to 0.7 Air consumption At 0.5MPa 19 46 200 360 660 1350 cm3 Note 3 Port size M5 Rc 1/8 Weight kg Note 4 XMA 0.33 (0.37) 0.61 1.40 (1.76) 2.00