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Basic weight 0.40 kg (Foot style 20) Additional stroke weight 0.06 kg/50 ST Air cylinder stroke 100 ST Additional air cushion weight 0.02 kg 0.40 + 0.06 x 100/50 + 0.02 = 0.54 kg (Foot style 20, 100 stroke) 10-14-11 12 Series CG5-S Construction With rubber bumper 80, 100 80, 100 t e t q o i r y !

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100) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

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) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 100 st Over 50 st to 100 st Over 50 st to 100 st Bore size (mm) Bore size (mm) Over 100 st Over 30 st to 100 st Over 30 st to 100 st 50 st or less 50 st or less Over 100 st 30 st or less 30 st or less Over 100 st 12 16 42 46 60.5 64.5 0 0 18.5 18.5 8 10 12 16 43 49 55 65 1 3 13 19 6 8 85 95 43 49 85 95

Battery-less

0 L = 100 mm Max. speed = Over 200 mm/s 10 10 LEYG25L E LEYG32L E/40L E LEYG32L E/40L E LEYG25L E LEYG32L E/40L E LEYG32L E/40L E Load mass m [kg] Load mass m [kg] LEYG25L E LEYG25L E LEYG16L E LEYG16L E 1 1 LEYG16L E LEYG16L E 120 125 120 125 0.1 0.1 10 100 1000 35 40 10 100 1000 35 40 Stroke [mm] Stroke [mm] Operating Range when Used as a Stopper LEYGM (Sliding bearing) Caution 100 LEYG32M

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1 e !

NCQ2/CQ2

(mm) Bore size (mm) Stroke range (mm) A B C D E F H I J K L M N O P Q S U W Z 32 40 50 63 80 100 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 13 13 15 15 21 27 16 16 20 20 25 30 45 52 64 77 98 117 17 17 22 22 26 26 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M16 x 2.0 M20 x 2.5 10.5 10 13 13 16 14 14 17 17 22 27 7 7 8 8 10 12 34 40 50 60 77 94 5.5 5.5 6.6 9 11 11 65.5 72 87 100 55.5

Hydraulic

(mm) S l R T V W H ZZ e f h Z 40 37 106 11 7.5 8 66 188 55 25 92 214 50 43 112 11 10 9 73 207 60 28 99 233 1/4 stroke 63 47 116 11 12 10 80 216 65 30 106 242 80 57 127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG V T

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EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

AC Servo Motor Driver (Pulse input type/Positioning type ）

[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.

Compact Cylinder

Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F H I J K L M N O P Q S U W Z 32 40 50 63 80 100 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 13 13 15 15 21 27 16 16 20 20 25 30 45 52 64 77 98 117 17 17 22 22 26 26 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M16 x 2.0 M20 x 2.5 10.5 10 13 13 16 14 14 17 17 22 27 7 7 8 8 10 12 34 40 50 60 77 94 5.5 5.5 6.6 9 11 11 65.5 72

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

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OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

ZP

(Hexagon) C Width across flat 21 (Hexagon) 1/8 (Rc, NPT, NPTF) G F E D C Width across flat 21 (Hexagon) 4 x M5 x 10 C 3 x M3 x 8 4 x M4 x 8 Y A B A B A B Dimensions Dimensions Dimensions B C D Model A 63 63 63 80 80 80 B C F D E G H Y Model A 100 100 100 100 125 125 125 125 B C D Model A 40 40 40 50 50 50 ZPX40H 25-A18 ZPX40H 50-A18 ZPX40H 75-A18 ZPX50H 25-A18 ZPX50H 50-A18 ZPX50H 75-A18

CA2

n = 2, 4, 6, 8 Same side 15 90 100 110 35 75 80 90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35

Rotary Actuator

B h wit ew 0 n tio 9 cr y s ec a ng dir w sti g y e dju tin k us a of Specifications gle dj e A g an n ra Type Pneumatic Size 30, 50, 63, 80, 100 n io at h ot R wit n A tio ec ew ir d Rotating angle 90, 180 (Size 30 to 100) 100, 190 (Size 50 to 100) cr ng sti s ju Ad ng sti ju ad e gl an Ambient and fluid temperature 0 to 100C Angle adjusting screw "B" Angle adjusting screw "A" Rotation

Air Cylinder Series CA2

e.

smcmaintenancepartslist

100 125, 140, 160 P.343 Construction 40 to 100 @5 C A D B 125 to 160 @7 L F E E K H J J M G The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CL1.

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of e to y.