ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 166 A C96 Series Dimensions Basic: C96S (D) B C (JJ) W Bore size Stroke With rod boot at both ends PL 2 x EE port PL Cushion valve WA WB Width across flats SW Width across flats SW KK D D e e d d KK WA WB L9

155

I Manual override 2.3 Cable for M12 connector (Option) Bracket 12 G O L M F E VNA 4 x K VNB 2 1 D SGC C H Main port VNC B A (2 locations) VNH VND A B C D E F G H I J K L M N O PP Main port Model SGC2lll-ll10 SGC2lll-ll15 SGC3lll-ll20 SGC4lll-ll25 3/8 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115 79.9 VCC 1/2 63 49.6 29 14.5 103.3 111.3 155.8 26 26 52 4.5 44.5 25 26.3 115

Environment

How to Order 25A-LEY 16 100 B C 1 1 6N S Series compatible with secondary batteries q w e r t y u i o !0 !1 !2 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D E F G H P U Part no.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

mounting brackets are used as a set. qBMA2includes a set of a and b in the figures. wBJ3-1 includes a set of c, d and e in the figures.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MB Data MC KA MA C NA K NB S + Stroke H B ZZ + Stroke The allowable angle difference of E to B should be limited to 1.5.

Cylinder with Turntable Series MGT

d e XAH7 XC XL X X0.02 T groove dimensions (mm) a b c d e XX section detail drawing Bore size (mm) 63 80 100 11 17.8 10 7 18.5 2 x R3 13.3 20.3 12 8 22.5 8 15.3 23.3 13.5 10 30 6+0.05 0 6 WB Z WA XX section QQ section detail drawing Notch spring force adjustment bolt 4 x OA through 4 x OB counterbore depth OL L 4 x MM depth ML 22.5 QQ section 8 x NN depth NL XX section Z WA Q 45 X0.02 RA

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

NCQ2/CQ2

Applicable Cylinder Series: (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/wT (Single acting), (N)CDQ2, (N)CDQ2W (Large bore size), (N)CDQ2K, (N)CDQ2KW, (Non-rotating rod), (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) Auto switch type s e r u t a e F l e d o M e z i s e r o b e l b a c i l p p A y r t n e l a c i r t c e l E D-A72 D-A73 Grommet (Perpendicular) D-A80 Without indicator light D-A79W

2

inlet (D) Port size (B) Port size (E) (A) (A) (B) (D) IDG (C) (C) Dimensions (mm) Applicable air dryer Port size Rc A B C Weight (kg) D E Part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 134 CP96 Series Dimensions Basic: CP96S (D) B C (JJ) W Bore size Stroke With rod boot at both ends PL 2 x EE port PL Cushion valve Width across flats SW Width across flats SW WB WA WB WA KK D D e e d d KK 2

Compact Cylinder

Water Resistant Auto Switch With Auto Switch Made to Order -XA1 to XA23/-XA26 to XA30 Symbol: A13 Symbol: A14 Symbol: A16 Symbol: A15 C1 DA H H DA C1 DA C 30 30 C DA 30 30 X L X L X L X L C C Symbol: A17 Symbol: A18 Symbol: A19 Symbol: A20 30 30 H1 H1 30 30 H1 H1 X X L X L X K L F L Symbol: A21 Symbol: A22 Symbol: A26 Symbol: A23 RD DA 30 30 30 H1 30 DA H1 DA E H1 DB DB B C T T X W X

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

C in the case of 15.

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Grease pack part no.: GR-S-010 (10 g) 435 Series MGZ Dimensions Basic style GA DL 2 x P (Rc, NPT, G) GB Y Y WM XAH7 depth XL +0.2 0 4 x MM depth M LL LM WL D1 HR KA C B E D 2 x 4 x J E MA MB KA MC C K NB N B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR D1 J K KA LL LM B D C DL E GA GB 40 50 63 40 45 50 57.5 63.5 69 78 92 110 M6 x 1 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)