ML1C Bore size (mm) Standard stroke (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400,
-D, IZT41-D Installation distance in height fr om ioniz er to workpiec e [ mm] Installation distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
198.5 21.5 13 248 237.5 209 22.5 14 260.5 250 219.5 23.5 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2 L3 L4 244 D-sub Connector 10-SV Dimensions: Series 10-SV2000 for D-sub Connector U D B 1 2 C4, N3 C6, N7 C8, N9 Cassette base manifold: 10-SS5V2-16FD (R)Stations When P, E port outlets are indicated on the U side or D side, the P, E
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Electric Actuator Series LEYG Guide Rod Type Pushing force (lbf) Vertical work load (lb) Screw lead (mm) Speed (mm/s) Stroke (mm) Controller series Specifications Series Page 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500 12 to 250 6 to 125 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 3.3 7.7 16.5 15.4 33 64 19.8 44 90.4 3.3 7.7 16.5 4.4 11.0 24.3 8.5 16.6 31.7
Cable length y 250 (194) 65 15 15 20 20 24 20 5H9 depth 5 ( ) 0.030 0 24 20 Lock cable (3.5) n x 5.5 [mm] 6 Model L 582 634 682 734 782 834 882 934 982 1034 1082 1134 A B n D E LEFS32;-300 LEFS32;-300B LEFS32;-400 LEFS32;-400B LEFS32;-500 LEFS32;-500B LEFS32;-600 LEFS32;-600B LEFS32;-700 LEFS32;-700B LEFS32;-800 LEFS32;-800B 60 430 6 2 300 306 150 530 8 3 450 406 D x 150 (= E) B 15 630 10
7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.
1(P), 3/5(E) port] Applicable tube O.D.
3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.
(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.
JH JW f h ZZ + Stroke Width across flats B3 Width across flats B3 With rod boot (Both sides) e e JH 8 8 f f l + Stroke 8 8 JW l ZZ + 2 x Stroke h + Stroke h 45 WA WA 45 Cushion needle (Width across flats 1.5) Cushion needle (Width across flats 1.5) With air cushion N1 N1 G G Built-in One-touch fittings One-touch fitting port size P Q (mm) E ZZ MM H1 AL H F A FL G K KA N NA NN P S I D B2 B1
Exceptional proven p e r f o r m a n c e . T h e standard in the field. 2-WAY CONDUIT 2-WAY GROMMET 3-WAY GROMMET 3-WAY CONDUIT SERIES 70 S U P E R V A L V E S 2and 3-way valves having ratings that formerly required valves of much greater size. 2-WAY CONDUIT 2-WAY GROMMET 3-WAY GROMMET 3-WAY CONDUIT 4 SOLENOID VALVES . . .
Lx = 250 mm, Ly = 180 mm, Lz = 1000 mm 4.
Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.
Note 6) Dimension E' cannot be less than the standard dimension E.
Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.
2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.
With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]
(Standard body dimensions) DE E -X -XA17 -XA21 20DA Data MM MM 30 (Standard body dimensions) 30 (Standard body dimensions) T A A E E 6-17-13 12 Simple Specials: -XC14: Change of Trunnion Bracket Mounting Position These changes are dealt with Simple Specials System.