Compact 5-Port Solenoid Valve

x n2 + e + 93.7 M = (L1 + c)/12.5 + 1 Decimal fractions are truncated.

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

E C x 200 (= D) 25 Note 1) Distance within which the table can move when it returns to origin.

1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Both Ends Tapped Style A B C D E H I J K L M O P S Q R Th9 U Z Bore size (mm) Stroke range (mm) M8 x 1.25 58.5 M6 x 1.0 12.5 10 31.5 14 0 0.052 (1) 125 to 200 250, 300 32 62.5 13 Rc 1/8 45.5 16 45 60 4.5 14 17 34 22 M8 x 1.25 66 M6 x 1.0 14 10 35 14 40 72 13 Rc 1/8 55 16 52 69 5 14 17 40 0 0.052 28 M10 x 1.5 80 M8 x 1.25 14 14 41 19 0 0.062 Note 1) For 125 to 200 stroke, strokes are by the

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

Pieces S 1 Piece n n Pieces M O U N T I N G See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange S T D S T R O K E/H U N D R E D T H S O F A N I N C H B O R E S I Z E 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200 6 (1/4) 10 (3/8) 16 (5/8) T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa

MG

43 49 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 200 st Over 50 st to 200 st Over 50 st to 200 st Bore size (mm) Bore size (mm) Over 200 st Over 30 st to 100 st Over 30 st to 100 st Over 200 st Over 100 st to 200 st Over 100 st to 200 st 50 st or less 50 st or less Over 200 st 30 st or less 30 st or less 104 104.5 51 51 20

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

24

54 72 44 44 120 200 300 39 77 117 167 28 3 3.5 M6 x 1.0 12 17 25 37.5 13.5 30 26 78 38 91 64 82 50 44 120 200 300 39 77 117 167 34 4 4.5 M6 x 1.0 12 17 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing) MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 25 to 100 st 125 to 200 st 250 st or more 25 to 100 st 125 to 200 st

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Electric Actuator

D Detector CN2 LECSB2-; LECSC2-; LECSS2-; L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N( ) W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

smcmaintenancepartslist

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G Replacement Parts Description Note Material Part no. No.

MY1

CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35 43 53 61 70 87 113 136 170 206 21 26 38 3.6 4.9 6.4 3.4 3.4 4.5 6.5 6.5 8 1.8 3 4 20Data A B MY-S25 50 8 5.5 35 M6 x 1 9.5 5 A B MY-S32 64

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B

Air Cylinder Series CA2

E B C CJ1 H1 H1 AL AL K A N F B1 K F A N H + Stroke S + Stroke Air release CJP B C H ZZ + 2 Strokes CJ2 With rod boot (One side) With rod boot (Both sides) CM2 e e e d d CG1 f 10.2 10.2 l MB f l f l + Stroke h + l + Stroke 10.2 h + l S + Stroke h + l ZZ + l + 2 strokes ZZ + 2l + 2 strokes MB1 (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA M MM N Without rod boot With

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Locking type C (Manual) 3(R) port PE port 3 position exhaust center Rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 4 1 0 1 0 4 5 24 VDC 12 VDC 3 position pressure center Manual override/Non plug-in type 6 9 Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Other 5 Option Electrical entry Grommet L plug connector

MGP

200st 75st 200st 24 28 34 54 70 78 25 30 38 M5 X 0.8 10 12 12 44 44 44 62 81 91 5 17 17 110 120 120 200 200 46 54 64 27 39 39 56 72 82 60 77 77 117 117 38 44 50 25, 50, 75, 100 3 3 4 16 20 25 3.5 3.5 4.5 M6 X 1.0 25, 50, 75, 100, 125, 150, 175, 200 M6 X 1.0 MGPM (Slide Bearing)/Dimensions A, DB, E MGPL (Ball Bushing Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 25st 125st