SY

+ + + + + SUP port Rc 1/4 EXH port Rc 1/4 (both sides) 81 + 60 5 E 1 P 10 20 10 1 1 Height when using DIN rail L type plug connector (L) M type plug connector (M) DIN terminal (D) 74.2 [75.5] 148.4 [151] 164.9 [167.5] 5 EA 1 P 3 EB 5 EA 3 EB 1 P 5 EA 3 EB 1 P 83.8 167.6 184.1 Approx. 300 93.9 187.8 204.3 186 202.5 Max. 10 93 Pg.7 (lead wire length) Approx. 300 83.5[90] (lead wire length)

5 Port Solenoid Valve Series VQZ1000/2000/3000

10 7.2 M5 x 0.8 (External pilot port) 1.1 M5 x 0.8 (Not used) 13.4 13.4 1.1 1/8 [1(P), 5(R1), 3(R2) port] 21 42 L-type plug connector (L): VQZ125 (R)-L1-01 0 1 M-type plug connector (M): VQZ125 (R)-M1-01 0 1 Approx. 300 (Lead wire length) 58.5 [65.5] 95.6 [100] 85.6 115.2 [119.6] Approx. 300 (Lead wire length) 47.2 [54.2] R2 R1 R2 R1 P P Unless otherwise indicated,

0.55

R P 4A 4A 4A 4A 4A P R 21 35 2B 2B 2B 2B 2B 2B 11.5 63.4 1/8 [1(P), 5/3(R) port] Manual override PE port 1.7 (Pitch) 36.3 (Lead wire length) (Lead wire length) P = 27.5 23.5 G: Approx. 300 H: Approx. 600 G: Approx. 300 H: Approx. 600 (Station n) (Station 1) L-type plug connector (L) (Indicator light) + + + + + 65 42 137.1 20 68.5 L: Dimensions n: Stations L n 42.3 2 3 4 5 6 7 8 9 10 11 12

24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P

Table of Contents

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

5 Port Solenoid Valve Series SV1000/2000/3000/4000

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

MY1

Adjusting bolt Load weight kg MY1B25 Horizontal impact: P = 0.5MPa MY1B63 Horizontal impact: P = 0.5MPa 0.5 2000 1500 2000 1500 H unit Impact speed mm/s Air cushion Impact speed mm/s 1000 1000 L unit Air cushion Shock absorber 500 400 300 500 400 300 2.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A port) P=19 21 22.5 9.5 R X R X P P 43 43 71.5 [72.8] 67.5 81.1 35 35 C6: MAX. 6 C8: MAX. 6.5 C6: MAX. 6 C8: MAX. 6.5 (Lead wire length) 300 80.6 [87.1] 300 (Lead wire length) (P/R port) 4-Rc (PT)1/4 57.1 [ ] for AC Other dimensions are the same as the grommet

VQZ1000/2000/3000

2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Magnetically Coupled Rodless Cylinder

wire (NPN) 3-wire (PNP) P P A96V A96 s s s s 5V p P P F9NV F9N IC circuit 5V 12V p P P F9PV F9P s p P P 12V F9BV F9B 2-wire s Relay PLC Grommet Yes 24V s 3-wire (NPN) 3-wire (PNP) p P P F9NWV F9NW Diagnostic indication IC circuit 5V 12V p P P F9PWV F9PW 2-color display p P P F9BWV F9BW 2-wire 12V s Lead wire length symbols 0.5m/ Nil (Example) F9NW 3m/ L F9NWL 5m/ Z F9NWZ Solid state switches

Table of Contents

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Valve Single Unit

(Mounting hole for manifold) A: Orange B: Green SYJ SX (Light/Surge voltage suppressor) (Lead wire length) (Lead wire length) 300 G: 300 H: 600 Polarity SX3220-M5 G H indication (A, B port) (P , EA, EB port) 3 M5 x 0.8 2-1.5 die-cast hole (For manifold gasket positioning) L plug connector (L): SX3220-LC4 C6 M plug connector (M): SX3220-M-C4 C6 300 (Lead wire length) 2-One-touch fittings

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Lead wire length) (Mounting hole) (Pitch) (P , EA, EB port) Rc 1/8 Stations (1) (2) (n) (Pitch) (Pitch) (A, B port) 2 one-touch fittings (A, B port) Applicable tubing O.D.: 4 6 L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 127.0 (3 position) 115.3 (3 position) (mm) 2 stations 52.5 42 6 7 8 9 10 11 12 13 14 15 16

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R P R 22 26.6 Approx. 300 (Lead wire length) 48.8 [51] L1 2 x 3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 Approx. 300 (Lead wire length) M5 x 0.8 (P, R port) 5 2 x 3.5 (For mounting) 48.8 [51] P R P R 26.6 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 4.5 12.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 M3 x 0.5

MY1

H unit 500 400 300 L unit Air cushion 200 100 1 2 3 4 5 10 20 30 40 50 m1, m2, m3max Load weight (kg) Adjusting bolt MY1H25 Horizontal collision: P = 0.5 MPa 0.5 2000 1500 Collision speed (mm/s) H unit 1000 Shock absorber L unit 500 400 300 Air cushion 2.

VZ100/300/500

(P , A, R port) VZ VS L plug connector (L) VZ54-LM plug connector (M) VZ54-M01 02 01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)]

3 Port Air Operated Valve Series SYJA300

R P R 26.6 22 Approx. 300 (Lead wire length) 48.8 [51] L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 5 M5 x 0.8 (P, R port) Approx. 300 (Lead wire length) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5 41.5 [48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5 [48.5] (Pitch) P=10.5 13.5 M3 x

REA/REB

Speed 300 mm/s Basic Type REA Direct Mount Type REAR Direct Mount Type REBR Bore size (mm) Model Specifications Order made product application table 10 15 20 25 32 40 50 63 XB11 (Long stroke) 1 REA P. 88 XC24 (With magnetic shielding plate) REA 2 P. 88 REA P. 88 P. 89 REAR XC57 (With floating joint) 3 Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL REBR REA REAR REAS X168

Basic type / Direct mount type Series CY3B/CY3R

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 1236

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.