Table of Contents

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

Electric Actuator/Slider Type

0 r S T7 300 S 2 S2 q w e t u o y Motor option e Motor type S 54 q Size Nil Without option B With lock r Lead [mm] 25 32 40 Symbol Type Output [W] Actuator size Compatible driver T6 AC servo motor (Absolute encoder) 100 25 LECSS2-T5 T7 200 32 LECSS2-T7 T8 400 40 LECSS2-T8 For motor type T6, the compatible driver part number sufx is T5. t Stroke [mm] 300 300 to to 3000 3000 w Motor mounting

AC Servo Motor Driver (Pulse input type/Positioning type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

Electric Actuators

D E Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

Made to Order

24 48 124 200 300 36 48 86 124 174 63 28 52 128 200 300 38 50 88 124 174 80 28 52 128 200 300 42 54 92 128 178 100 48 72 148 220 320 35 47 85 121 171 26 to 399 MGPM-Z/A, E Dimensions MGPL-Z, MGPA-Z/A, E Dimensions Bore size (mm) A E 11 to 74 st 76 to 99 st 101 to 249 st 11 to 74 st 76 to 99 st 101 to 249 st 12 42 60.5 82.5 0 18.5 40.5 16 46 64.5 92.5 0 18.5 46.5 Bore size (mm) A E 11 to

Air Cylinder Series CM2

Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104 137 Up to 300 Up to 450 139 148 to 450 Up to 300 Up to 300 5 4 7

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

SY

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Manual override G:Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D, Y: With connector Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type + + + + H:Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO, YO: Without connector + + Light/surge voltage

Table of Contents

OR-1860-120F F: FKM E: EPDM For VCB30 OR-2380-130F F: FKM E: EPDM For VCB40 OR-2600-180F F: FKM E: EPDM e When external leakage occurs after disassembling a valve, replace the above seals.

Table of Contents

D E Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

MGP

300 3.5 3.5 3.5 4.5 41 46 54 64 15 17 29 29 50 56 72 82 25 27 39 39 37 38 44 50 12 16 20 25 16 M5 x 0.8 18 M6 x 1.0 26 M6 x 1.0 MGPM (slide bearing)/Dimensions A, DB, E MGPL (ball bushing)/Dimensions A, DB, E (mm) (mm) A E DB A E DB Over 100st Over 50st to 100st Over 50st to 100st Bore size (mm) Bore size (mm) Over 100st Over 30st to 100st Over 30st to 100st Over 100st 50st or less 50st

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) 2-Rc 1/4 (SUP port) VFS VS4 300 (Lead wire length) VQ7 L Dimension n: Stations n L 10 338.5 326.5 310 9 312 300 283.5 8 286 274 257 7 259.5 247.5 231 6 233 221 204.5 5 206.5 194.5 178 4 180 168 151.5 3 154 142 125 2 127.5 115.5 99 EVS L1 L2 L3 VFN : With light/surge voltage suppressor Individual EXH: VV5F3-71-3 (G) (E) Applicable cable O.D. 6 to 8 (T) (D, Y) Applicable cable O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Order 300 S V7 S B 3 M2 LEFB 32 q w e r y t u i o !

MG

44 110 27 60 105 200 28 70 30 3 81 3.5 54 M6 x 1.0 72 12 44 17 44 120 300 39 77 117 167 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 200 34 78 38 4 91 4.5 64 M6 x 1.0 82 12 50 17 44 120 300 39 77 117 167 MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 50 st 25 st 75 to 100 st 75 to 100 st 125 to 200 st 250 st or more 125 to 200 st 250 st or more 16

Electric Actuator

LEFS32;-300 LEFS32;-300B LEFS32;-400 LEFS32;-400B LEFS32;-500 LEFS32;-500B LEFS32;-600 LEFS32;-600B LEFS32;-700 LEFS32;-700B LEFS32;-800 LEFS32;-800B 60 430 6 2 300 306 150 530 8 3 450 406 D x 150 (= E) B 15 630 10 4 600 506 15 [mm] 730 10 4 600 606 Model L 387.5 439.5 487.5 539.5 A B n D E LEFS32;-100 LEFS32;-100B LEFS32;-200 LEFS32;-200B 106 230 4 830 12 5 750 706 300 206 330 6 2 930

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

Air Slide Table

= 100 V = 100 3 3 V = 200 V = 200 2 2 V = 300 V = 300 V = 500 1 1 0 0 50 100 150 200 250 300 0 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 300 mm L3: Overhang Allowable range: 400 mm Allowable overhang L [mm] Allowable overhang L [mm] 167 Model Selection MXQ Series Determine the overhang.

Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.