Shock Absorbers and Rate Controls

8 150 5 In0tilI.5(B) .44 0.50 3-50 250 ?84.000 775 2.0 3.8 250 5 0tnt.0(8) .50 1.00 12.130 650 6n,000 t,000 3.0 6.0 300 l 0 tR0IIt .0(8) .50 1.00 3-50 650 6n.000 1.000 3.0 6.0 450 t0 0tltl.l5xl .63 1.00 l2-130 r,700 670,000 ?.

CYP

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYPSeries

Dynamic moment Me3 We W L2 = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

CYV

Dynamic moment Me3 We W L2 Review Me3. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 W We Me1 = 1/3 We(L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Dynamic moment Me3 L2 We W Review Me3. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 Me1 = 1/3 We(L1 + B) 103 W We = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

= 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1.

K35-OMW0031

HART Communication 30 h Pistonrod Retract end Moving area Output current value Total time (h) Display time (h) Piston movement 0% 5% ~5% ~4.8mA 3.125 3 10% 5~10% 4.8~5.6mA 0.625 0 10~30% 5.6~8.8mA 2.5 2 30% 30~50% 8.8~12mA 6.25 6 50% 50~70% 12~15.2mA 2.5 2 70% 70~90% 15.2~18.4mA 7.5 7 90% 95% 90~95% 18.4~19.2mA 1.875 1 100% 95%~ 19.2mA~ 5.625 5 Extended end (Set point by calibration) Total

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Dynamic moment Me3 We W L2 Review Me3. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 W We Me1 = 1/3 We(L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

Clean Rodless Cylinder Series CYP

69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".

KS/KX

SKX, #16 to #30 Hl Dl MS Tl 2.1-34

Made to Order

MGGB20 to 50--XC6A MGGB20 to 50--XC6B MGGB20 to 50--XC6C MGGF20 to 50--XC6A MGGF20 to 50--XC6B MGGF20 to 50--XC6C Small flange Front mounting flange Small flange AA AA AA AL (mm) (mm) (mm) AA Bore size (mm) 20 25 32 40 50 AA Bore size (mm) 20 25 32 40 50 AL Bore size (mm) 20 25 32 40 50 AA 12 12 12 9 16 16 16 9 16 16 16 9 19 19 19 12 25 25 25 12 1768 C Made to Order Common Specifications:

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

M2 m2 M3 m3 25 32 40 23 26 23 27.5 27.5 27.5 MY1H 39 50 39 39.2 39.2 39.2 50 50 39 50 50 50 The above values are the maximum allowable values for moment and load mass.

CC

24 40 40 28 100 27 1 115 62 180.5 124.9 CCVL02-lG-S 3/4 66 107 116 135 50 24 40 40 28 100 27 2 135 80 180.5 132.8 CCVLl1-lG-S M6 X 1 10.5 to 12.5 3/4 66 107 116 135 50 24 40 40 28 100 27 1 135 80 115 180.5 124.9 CCVLl2-lG-S 3/4 66 107 116 135 50 24 40 40 28 CCVLl3-lG-S 100 27 1 135 80 115 180.5 124.9 3/4 66 107 CCVLl0-S 116 50 40 28 100 27 135 80 115 *Pitch of mounting on the

Digital Gap Checker ( compatible)

X+25 X Display (25 to 0) 25 (100 to 76) (75 to 51) (50 to 26) value ISA3-H X+150 X+100 X+50 X (50 to 0) 50 (200 to 151) (150 to 101) (100 to 51) ISA3-F ISA3-G X+750 Process X+500 X+250 X (250 to 0) 250 (1000 to 751) (750 to 501) (500 to 251) data ISA3-H : The value in the brackets in level 2 shows the boundary value. -66No.PS-OMW0009-C 4 How to use X: Switch point is divided by weight.

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X