ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

NCQ8

Mounting bolt C D Mounting Bolt Size for NCQ8B056 to 250(Without Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCQ8B056-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B075-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B106-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B150-012 025 037 050 062 075 087 100 125 150

Smooth Cylinder/Low Speed Cylinder

(Nil) UZ Rod side trunnion style CM2X L 40 150 C L With auto switch 40 M9BW 150 CDM2X Number of auto switches With auto switch (Built-in magnet) Thread type Nil S n 2 pcs. Nil TN TF Rc 1 pc. Low speed cylinder NPT Bore size n pcs.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 450 300 C 3 225 150 LEY25l Motor mounting position: Top/Parallel, In-line 100 W /l40 LEC Y LEC Y (Motor rotation speed) (4500 rpm) (3000 rpm) Motorless A 20 1200 800 B 10 600 400 C 5 300 200 LEY32l Motor mounting position: Top/Parallel 200 W /l60 LAT (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line LZ 200 W /l60

15

(Motor rotation speed) (4500 rpm) (3000 rpm) A 20 1200 800 B 10 600 400 C 5 300 200 LEY32l Motor mounting position: Top/Parallel 200 W equivalent (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W equivalent (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

MHZ

K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

MY1

Wn 111 210 X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 0 mm 5 mm 65 mm Y Wb 4.35 kg 0 mm 42.5 mm 150 mm Wc 0.795 kg 111 mm 42.5 mm 150 mm X Wd 0.5 kg 210 mm 42.5 mm 150 mm 65 150 n = a, b, c, d 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

150 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 120 145 C' D' 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 50 55 60 65 70 75 80 85 90 125 150 CQ2KB40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2KB63

Air Slide Table

Model Stroke MXQ8(A, C) 50, 75 MXQ12(A, C) 75, 100 MXQ16(A) 100, 125 MXQ20(A) 100, 125, 150 MXQ25(A) 125, 150 MXQ6B 50, 75 MXQ8B 75, 100 MXQ12B 100, 125 MXQ16B 100, 125, 150 MXQ20B 125, 150 159 Model Selection MXQ Series Selection Example 1 (Transfer, Table Mounting) Selection Example 2 (Transfer, End Plate Mounting) Selection conditions Selected model: MXQ8B-30ZEJ Load mass: 0.3 kg Average

XM, XY

80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177 B 80 100 117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal

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