Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 4) Kit/Electrical entry/Cable length F P kit (D-sub connector) kit (Flat ribbon cable connector) Note 1) 26P 26P Note 1) Note 1) 25P Side entry Top entry Side entry Top entry Note 1) 25P Connector entry direction Top entry Side entry Connector entry direction Top entry Side entry U0 U1 U2 U3 P. 2-4-76 P. 2-4-78 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable With cable (1.5 m) With

Plug-in/Plug Lead: Single Unit

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

R1 port A, B port D side U side P port Port R2 0 A Without SI unit With general type SI unit (Series EX300) Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System Electrical entry D side U side IP65 compatible B Cable length 0.6 m Cable length 1.5 m Cable length 3 m U0 U1 U2 D0 D1 D2 Note) Shown VV5Q41-05C12FD0 Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 available Without cable Cable length 1.5m Cable length 3m Cable length 5m U0 U1 U2 U3 U side D0 D1 D2 D3 D side 2 to 12 stations 2 to 12 stations Cable length 0.6m Cable length 1.5m Cable length 3m U0 U1 U2 D0 D1 D2 Kit F Kit F Kit L Kit L Type of connection T1 S Kit (Individual terminal

Precautions 1

MM ND hole Shaft ND hole H10 ND hole H10 MM MM Shaft d9 Shaft d9 NX2 L R2 U2 A H Z E1 E1 NX NZ L NX NZ L (Min.) A1 U1 L1 A A1 U1 L1 A Applicable cylinder bore size 20 ND E1 L L1 MM A A1 H L MM ND NX2 R2 U2 Y Z A Part no.

5

Z (MIN) (mm) Bore size A H L MM ND NX2 R2 U2 Y Z 20 18 41 25 M8 x 1.25 9 9 +0.2 +0.1 10 14 11 66 25, 32 22 45 25 M10 x 1.25 9 9 +0.2 +0.1 10 14 14 69 40 24 50 49.7 M14 x 1.5 12 16 +0.3 +0.1 13 25 13 92 Double Knuckle Joint Material: Cast iron Y-040B Material: Carbon steel Y-020B, 032B RR1 RR1 ND hole H10 Axis d9 MM ND hole H10 Axis d9 MM E1 E1 LA NZ NX NZ NX LA A1 U1 LB A1 U1 LB A A (mm)

Air-hydro Unit

Control valve Suffix 0 None Flow control valve (With pressure compensation) Throttle valve Timid flow control valve (CCVS series only) S Single valve 1 Unit for CC63 (Unit mounted to CCT63) U1 2 Unit for CC100 and CC160 (Unit mounted to CCT100 and 160) U2 3 CCVS/CCVL Valve Unit Part No.

Air Cylinder

A H Z MB1 CA2 Bore size A H L MM ND NX2 R2 U2 Y Z 20 18 41 25 M8 x 1.25 9 9 +0.2 +0.1 10 14 11 66 25, 32 22 45 25 M10 x 1.25 9 9 +0.2 +0.1 10 14 14 69 40 24 50 49.7 M14 x 1.5 12 16 +0.3 +0.1 13 25 13 92 CS1 CS2 Double Knuckle Joint (mm) Y-020B/032B Material: Carbon steel Y-040B Material: Cast iron R1 R1 ND hole H10 Axis d9 MM MM ND hole H10 Axis d9 E1 E1 NX NZ LA NX NZ LA A1 U1 LB A A1 U1

MY1

MY1M40 MY1M50 MY1M63 U section detail dimensions P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 3/8 NG 13.5 17 29 34 42.5 54 68 NW 56 60 60 74 94 118 142 Z 160 200 220 280 340 400 460 PA 40 50 60 80 100 120 140 NC 13.5 17 21 26 32 43.5 56 U1 5.5 5.5 5.5 5.5 6.5 6.5 8.5 NH 27.7 33.7 40.5 50 63.5 83.5 105 PG 3.5 4.5 7 8 9 10 12 PB 40 40 50 60 80 90 110 NE 28 34 41.8 52.3 65.3 84.5 104 U2

CC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Unit for CC100 and CC160 (Unit mounted to CCT100 and 160) U2 Control valve Electrical entry of solenoid valve 0 None Flow control valve (With pressure compensation) Throttle valve Timid flow control valve (Series CCVS only) Nil G C D Air operated Grommet

NCQ2/CQ2

300 125 140 160 180 200 5.30 5.54 5.77 6.01 6.24 6.83 7.40 7.99 8.58 9.16 9.75 10.92 12.09 6.26 6.51 6.78 7.05 7.32 7.97 8.64 9.30 9.97 10.63 11.30 12.62 13.95 8.65 8.96 9.28 9.60 9.92 10.72 11.52 12.33 13.13 13.93 14.73 16.34 17.93 11.62 12.00 12.39 12.78 13.17 14.13 15.11 16.08 17.05 18.01 18.98 20.92 22.86 14.64 15.15 15.57 16.00 16.42 17.49 18.55 19.62 20.68 21.75 22.90 24.93 27.07 1g

V100

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

3 Port Solenoid Valve Metal Seal Series VZ200 1

VZ22 20 Rc 1/8 VZ22 30 Rc 1/8 (Example) VV3Z2-20-081 (8 stations) VV3Z2-50081-C6 (8 stations) VZ212-1G-M5 5 pcs. VZ215-5M5 pcs. VZ212-1G-M5 2 pcs. VZ215-5M3 pcs. VVZ200-32A-1 1 pc.

Series KP/KPQ/KPG

No. 1 2 3 4 5 6 7 8 9 10 11 Polypropylene resin Polypropylene resin SUS304 stainless steel SUS304 stainless steel Polypropylene resin (color: light green) Polypropylene resin SUS304 stainless steel EPDM EPDM EPDM SUS304 stainless steel Body Stud Chuck Guide Release button Collet Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g

Series KP/KPQ/KPG

No. 1 2 3 4 5 6 7 8 9 10 11 Polypropylene resin Polypropylene resin SUS304 stainless steel SUS304 stainless steel Polypropylene resin (color: light green) Polypropylene resin SUS304 stainless steel EPDM EPDM EPDM SUS304 stainless steel Body Stud Chuck Guide Release button Collet Stopper Seal Bumper O-ring Drive bushing 5 Series KP Clean One-Touch Fittings Dimensions (mm) 1in = 25.4mm, 1g

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Manifold base) VF5120-1G-032 pcs. (Valve) VF5220-1G-032 pcs. (Valve) DXT156-19-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, VALVE UNIT, OTHERS, CH HYDRAULIC CYLINDER, 22, NO SIZE RATING KIT/ACDESSORY, 3.74000 lb

7ND9071en

Comply with the requirements for FISCO field device II 1G Ex ia IIC T6...T4 Ga II 1D Ex ta IIIC T90 C Da II 2 G Ex ib IIC T6...T4 Gb II 2 D Ex tb IIIC T90 C Db II 1 D Ex ia IIIC T90 C...T120 C Da II 2 D Ex ib IIIC T90 C...T120 C Db EN 60079-0: 2012 EN 60079-11: 2012 EN 60079-26: 2007 EN 60079-31: 2009 EN 60079-0: 2012 EN 60079-11: 2012 EN 60079-15: 2010 EN 60079-31: 2009 II 3 G Ex nA IIC