Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of 500 mm/s, use graph (2).

Mechanically Jointed Rodless Cylinder Series MY2

MY2C16 MY2H16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 2000 2000 1500 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 500 L unit 400 300 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

MY2

Calculation of Guide Load Factors 1 Operating conditions Mounting orientation Cylinder MY2H40G-500 Average operating speed a 300mm/s Mounting orientation Wall mounting 1. Horizontal mounting 2. Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Operating Conditions Mounting Orientation Cylinder MY2H40G-500 Average operating speed a 300 mm/s Mounting orientation Wall mounting 1. Horizontal mounting 2. Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

Sine Rodless Cylinder Series REBR Direct Mount Type

750 15 1 axis 200, 300, 400, 500, 600, 800 25 1200 25 200, 300, 400, 500, 600, 800, 1000 2 axes 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

CEx-OMP0016

Driving Direction Left Right Brake Operating Port Brake Release Port Head Cover-WL Head Cover-WR Tube face No. 1 2 3 4 5 6 Type of head cover Head Cover-WL Head Cover-WR Tubing face Front Side Bottom Front Side Bottom Left A C E G I K Operating direction Right B D F H J L Note: 1)Tubing should be group according to the grouping in the table above, 6 on

ML1

, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 25 32 40 2000 2000 2000 *When the required stroke is longer than the standard stroke , refer to the specifications for Made to Order q (p.5.4-79) longer stroke styles.

Lightweight and Compact

Note) 200 V type only. 400 V type is provided with an earth leakage breaker as standard. 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) HRZ Specifications HRZD Model HRS090-Wl-20-l HRS090-Wl-40-l Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C 5 to

53

mA AC/DC (resistance load) Minimum load current 5 VDC 10 mA Output voltage 24 VDC 10% 500 mA MAX (not usable for inductive load) Contact output signal To the thermo-chiller Users equipment side 7 24 VDC 6 24 VDC output (500 mA MAX) 5 15 14 24 VCOM output 13 24 VCOM Signal description Default setting 12 4.7 k Circuit diagram Contact input signal 2 4 1 k 11 Run/stop signal input Contact input

CEx-OMQ0011

Sol.1 Sol.2 Sol.3 A ON OFF ON B OFF ON ON OFF OFF OFF 25 VFS250 VFS240R VFS210 AR425 6-4 32 VFS250 VFS240R VFS210 AR425 6-4 40 VFS250 VFS240R VFS210 AR425 8-5 50cm 1m 0.30.5MPa0.3MPa 0.5MPa 15 <> <> <> <> <> <> WR WL 1 2 3 4 5 6 WL WR A C E G I K B D F H J L 1)6 2)1245 SMC O A 2532 40 O C9 C11.2 Rz12.5 A 6 8 16 4-1 ML2 () 1(an1) (an1 ) 500mm/s W N Va P MPa NG NG

Magnet: None, Series: BA2 (with End Lock), Mounting: B (Basic Style), Tube Material: Aluminum Tube, Bore Size: 100mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: W (Lock Both Sides), Release Type: L (Locking)

Magnet: None, Series: with End Lock, Mounting: Basic Style, Tube Material: Aluminum Tube, Bore Size: 100mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Lock Both Sides, Release Type: Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

CNA

MXS 50 50 50 40 40 40 80 80 80 100 100 63 63 63 MXQ Load weight m(kg) Load weight m(kg) 50 50 50 40 40 40 50 40 30 50 40 30 MXF 20 20 [Example] MXW 10 10 MXP 5 4 3 5 4 3 MG 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 MGP Max. speed V(mm/s) Max. speed V(mm/s) MGQ Graph m Graph v 0.5MPa P 0.5MPa P MGG 1000 1000 100 100 100 80 80 80 MGC 500 400 300 500 400 300 63 63 63

C95

40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

-fl Seies

EXH block di6c Blank plate: WFS40O0-1OA EXH Relocation spacer lnterface sped control wl-En disassembling valve for maintenance purposes or when spare manifold stations are required, install Blank plate on the manifold block. %% % % Needle valve on the manifold block can controlcylinder speed by ihrottling exhaust.

Vacuum

Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of