ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

reduces flow setting time

As a guide, tighten it by hand, then turn it two or three turns with a wrench. Check the dimensions of each product for the hexagon width across flats.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

As a guide, tighten it by hand, then turn it two or three turns with a wrench. Check the dimensions of each product for the hexagon width across flats.

Soft start up valve with lock out

) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil B A 3(R) DZ 1/2 (AVL4000) 04 G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push button protrudes by 1mm over the body. 200VAC (50/60Hz) 2 DZM 1 (AVL5000) 10 110

Table of Contents

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

AS

AS22;1F-01-23(S)A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5

Check Valve Series AK

Cracking pressure is a pressure at which the valve starts opening and not a pressure at which the valve is fully open. 15-8-7

Series VS

(A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT USED X17 X17 PIN 1 PIN 1 X6 X6 PIN 1 PIN 1 NOT USED NOT USED X53 X53 14 (A) + 14 (A) + PIN 1 PIN

AKH/AKB Series

Note: 1in = 25.4mm 18mm2 = 1Cv 1g = 0.0353oz 4 Check Valve with One-Touch Fitting Series AKH/AKB Dimensions (mm) 1in=25.4mm Bushing Type: AKB Millimeter Size Connection thread size R (a) Weight g Effective area (mm) A Connection thread size (a) L H Model (b) 1/8 1/4 3/8 1/2 AKB01-01S AKB02-02S AKB03-03S AKB04-04S 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 1/8 1/4 3/8 1/2 18 44

AKH/AKB Series Check Valve with One-touch Fitting

Note: 1in = 25.4mm 18mm2 = 1Cv 1g = 0.0353oz 4 Check Valve with One-Touch Fitting Series AKH/AKB Dimensions (mm) 1in=25.4mm Bushing Type: AKB Millimeter Size Connection thread size R (a) Weight g Effective area (mm) A Connection thread size (a) L H Model (b) 1/8 1/4 3/8 1/2 AKB01-01S AKB02-02S AKB03-03S AKB04-04S 14 17 22 24 23.7 39.8 45.2 56.2 19.7 33.8 38.7 48.2 1/8 1/4 3/8 1/2 18 44

Check Valve Series AK 1

Effective area (mm2) Weight (g) A L M Model AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Inch Size Applicable tubing O.D. d Applicable tubing O.D. d T D1 D2 D3 L1 L2 L3 M1 L4 (3) A (2) D1 D2 L1 L2 L3 L4 (3) A (2) Weight (g) H (1) Weight (g) H (1) T M1 Model Model Min.

Title not found

(mm) Model KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 4 6 8 10 12 KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S M5 4 R1/8 M5 6 R1/8 R1/4 R1/8 8 R1/4 R3/8 R1/4 10 R3/8 R3/8 12 R1/2

Vacuum System Peripherals:

As a result, the piping labor can be dramatically reduced. Port size Rc Controlled flow (l /min (ANR)) Model Applicable tubing O.D. (mm) Elbow type AS1301F-M5-X214 AS2301F-01S-X214 AS2301F-02S-X214 AS3301F-03S-X214 AS4301F-04S-X214 Misc.

KC

Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function. Bulkhead connector P. 60 KCE Use to connect male thead and tube through a panel. 15-2-67 Series KC Precautions Be sure to read before handling.

Self-seal Fittings Series KC

Bulkhead female union P. 77 KCE Use for transit connection of a tube and a male screw for installation of panel. 74 Series KC Self-seal Fittings M5 Half union: KCH M5 Applicable tube O.D. (mm) Effective orifice(mm 2) Weight (g) A Thread R(PT) Part No. H (Hex.)

IDX-OM-W035

(N) AD48-8-A-X2112 () KQ2H11-35AS (N) KQ2H10-02AS () 3/8 (N) 10 () IDFB22E/37E--K N.

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 04S (PT 1/2), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)

Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: 04S (PT 1/2), A Side Port Size: 04S (PT 1/2), Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)