(30) AS32l1FG-03-08(S)A 8 13.2 22.7 33 14.2 AS32l1FG-03-10(S)A 10 15.9 26.7 37 28 15.6 30 (31) AS32l1FG-03-12(S)A 12 18.5 29.7 40 26.8 17 32 (33) AS42l1FG-04-10(S)A 10 1/2 24 (23.8) 10.4 21.8 32.1 28.7 42.3 40.7 37.1 35.5 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 50.8 49.2 43.7 42.1 15.6 52 (51) AS42l1FG-04-12(S)A 12 18.5 30.8 43.7 (43.6) 35.1 17 54 (53) AS42l1FG-04-16(S)A 16 23.8 34.8
ZP3-T08B;-A10-04 [Weight: 10.3 g] ZP3-T06B;-A10-04 [Weight: 10.2 g] ZP3-T04B;-A10-04 [Weight: 10.2 g] Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 3 3 3 3 3 3 17 8 17 8 17 8 12 2 12 2 12 2 25 25 25 M10 x 1 M10 x 1 M10 x 1 8 8 8 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 1.8 2.2 3.4
ZP3-T08B;-A10-04 [Weight: 10.3 g] ZP3-T06B;-A10-04 [Weight: 10.2 g] ZP3-T04B;-A10-04 [Weight: 10.2 g] Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 3 3 3 3 3 3 17 8 17 8 17 8 12 2 12 2 12 2 25 25 25 M10 x 1 M10 x 1 M10 x 1 8 8 8 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 1.8 2.2 3.4
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 12.2 27 7 7 17 22.2 8 10.4 26 28.8 M5 x 0.8 25.2 22.4 9.6 6 (12.2) 28 8 8 18.5 23.2 12.8 (26) (28.8) 4 31.4 17 17 17 24.3 10.4 13.4 30.5 35.5 6 R 1/8 32.4 27.4 12 14.2 32.4
Form w 1 Material e Vacuum inlet Width across flats K r Connection thread Q A 10 A5 70 49 32.9 24 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 71 50 33.9 25 10 N S U F GN GS 75 49 32.9 24 2.5 M6 x 1 26 8 4 10 8 M5 x 0.8 16 76 50 33.9 25 25 89.5 63.6 45.8 35 3.5 12 12 M8 x 1.25 40 97 71.1 53.3 42.5 4 25 A8 79.5 63.6 45.8 35 3.5 M8 x 1 16 12 4 12 12 M8 x 1.25 40 87 71.1 53.3 42.5 4 04 06 08 D C B ZP
N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.
ZP3-T08B;-A10-04 [Weight: 10.3 g] ZP3-T06B;-A10-04 [Weight: 10.2 g] ZP3-T04B;-A10-04 [Weight: 10.2 g] Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 3 3 3 3 3 3 17 8 17 8 17 8 12 2 12 2 12 2 25 25 25 M10 x 1 M10 x 1 M10 x 1 8 8 8 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 1.8 2.2 3.4
ZP3-T08B;-A10-04 [Weight: 10.3 g] ZP3-T06B;-A10-04 [Weight: 10.2 g] ZP3-T04B;-A10-04 [Weight: 10.2 g] Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 3 3 3 3 3 3 17 8 17 8 17 8 12 2 12 2 12 2 25 25 25 M10 x 1 M10 x 1 M10 x 1 8 8 8 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 1.8 2.2 3.4
ZP3-T08B;-A10-04 [Weight: 10.3 g] ZP3-T06B;-A10-04 [Weight: 10.2 g] ZP3-T04B;-A10-04 [Weight: 10.2 g] Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 3 3 3 3 3 3 17 8 17 8 17 8 12 2 12 2 12 2 25 25 25 M10 x 1 M10 x 1 M10 x 1 8 8 8 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 1.8 2.2 3.4
ZP3-T08B;-A10-04 [Weight: 10.3 g] ZP3-T06B;-A10-04 [Weight: 10.2 g] ZP3-T04B;-A10-04 [Weight: 10.2 g] Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 Width across flat 14 Applicable tubing: 4 3 3 3 3 3 3 17 8 17 8 17 8 12 2 12 2 12 2 25 25 25 M10 x 1 M10 x 1 M10 x 1 8 8 8 Width across flat 7 Width across flat 7 Width across flat 7 3 3 1.8 1.8 1.8 2.2 3.4
VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)
12 stations Note) SS5Y3 has 4 to 12 stations.
Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02
) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14
-R12 4 3-06 LQ1-3N06 LQ1-3B06 5-12 LQ1-5N12 LQ1-5B12 5-12 LQ1-5N12 LQ1-5B12 LQ1T41-R22 4 4-10 LQ1-4N10 LQ1-4B10 3-06 LQ1-3N06 LQ1-3B06 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-R23 4 3-06 LQ1-3N06 LQ1-3B06 3-06 LQ1-3N06 LQ1-3B06 5-12 LQ1-5N12 LQ1-5B12 LQ1T41-R24 4 4-12 LQ1-4N12 LQ1-4B12 2-04 LQ1-2N04 LQ1-2B04 4-10 LQ1-4N10 LQ1-4B10 LQ1T41-R26 4 4-12 LQ1-4N12 LQ1-4B12 2-03 LQ1-2N03 LQ1-2B03 4-12 LQ1-4N12
06 08 10 12 16 Symbol 01 02 03 04 06 Tubing O.D. mm 4 6 8 10 12 16 Hose O.D.
32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42) AS421FS-04-10 (S) 10 1/2 24 (23.8) 3/8 19 16.6 15.9 18.8 27.4 40.3 (40.2) 36.2 64.1 62.5 57 55.4 15.6 26 29 10 19 62 (61) AS421FS-04-12 (S) 12 18.5 30.8 43.7 (43.6) 35.1 17 64 (63) AS421FS-04-16 (S
-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350