Model: ASQ (Flow Valve), Size: 5 (3/8 Standard), Port Size: 02 (1/4), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

BP1000

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Model: Flow Valve, Size: 3/8 Standard, Port Size: 1/4, Applicable Tubing O.D.: ø10mm, Option: Fixed set pressure type (0.2 MPa), Lock Nut: -

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Model: Pressure Valve, Size: 1/4 Standard, Port Size: 1/4, Applicable Tubing O.D.: 1/4", Option: Fixed set pressure type (0.2 MPa), Thread: NPT

PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

CATALOG

2 0.17 3 Water VX2330 0.7 0.45 0.45 0.7 VX2122-02 3 0.33 6 VX2340 1 0.8 0.7 1 VX2-02 3 0.33 6 Oil VX2250 1.6 1.2 1 VX2322-02 3 0.33 6 VX2260 VX070-029 0.3 0.2 0.2 0.3 1/4 VX2132-02 4.5 0.61 11 Air VX2350 0.45 0.3 0.3 0.45 (8A) VX2232-02 4.5 0.61 11 3 5 VX2360 0.8 0.6 0.6 0.8 VX2332-02 4.5 0.61 11 0.25 0.15 0.15 0.25 VX2242-02 6 1.05 19 0.45 0.35 0.35 0.45 VX2342-02 6 1.05 19 1 0.8 0.7

Digital Flow Switch

Press the or button in function selection mode to display [F20]. [F20] and [inP] are displayed in turn. Press the button. External input [inP] and [the current set value] are displayed in turn. Press the or button to select. Press the button to set. [F20] Setting of external input completed. Return to function selection mode.

PFxx-OMP0001CN

][] [F20] GND 30 msec.

Digital Flow Switch (Remote type monitor unit)

[F20] Setting of external input is completed. -46No.PF-OMN0012-H [F22] Setting of analogue output This function can be used only when the optional analogue output is present. If the optional temperature sensor is fitted, the analogue output of fluid temperature can be selected.

PF-OMN0011_C

[F 2] OUT2 c()F( oF)() -38No.PF-OMN0011CN-C H_t Ht Ht H_t Ht Ht -39No.PF-OMN0011CN-C [F 3] [F 3] [RES] [F3] 7 s -40No.PF-OMN0011CN-C [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] OUT1 OUT1 OFF [F10] -41No.PF-OMN0011CN-C -42No.PF-OMN0011CN-C -43No.PF-OMN0011CN-C == 1 / ,/ ([F20](45 )) [F82](51 ) c () -44No.PF-OMN0011CN-C [F20] =00 = ON EEPROM 100 +100 OFF 30 msec.GND 1 [ooo] 1

Digital Flow Switch (Integrated display type)

[F20] Setting of external input is completed. -50No.PF-OMM0005-N [F22] Setting of analogue output This function can be used only when the optional analogue output is present. If the optional temperature sensor is fitted, the analogue output of fluid temperature can be selected.

Dual Speed Controller with One-touch Fitting Series ASD

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 ASD530FG-02-10S 18.5 21 23.1 34.4 12 55.9 ASD530FG-02-12S 20.9 22 25.2 48.3 6 17 ASD530FG-03-06S 12.8 20.3 28.2 51.3 8 18.5 ASD530FG-03-08S 15.2 23 19.8

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.

ZP

ZP3-T13UM;-A12-02 ZP3-T16UM;-A12-02 Mounting Adapter Part No.