Table of Contents

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit Series ZYY/ZYX 1

port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector Valve Unit Series ZYY/ZYX Ejector Valve Specifications Series SY3000/SX3000 in manifold/split base combinations DIN rail mount type can be mounted ZY3-07S

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

Microspeed Cylinder

Dual Type Flow rate and effective area Model ASD230FM-M5 ASD330FM-01 ASD430FM-02 8, 10 6 6, 8 4, 6 Metric sizes Inch sizes Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" l/min (ANR) (CFM) 7 (0.25) 12 (0.42) 38 (1.33) Flow rate Controlled flow 0.1 (0.006) 0.6 (0.03) 0.2 (0.01) Effective area mm (cv) Free flow l/min (ANR) (CFM) Flow rate 175 (6.1) 350 (12.3) 75 (2.6) 295

CJ2X/CUX/CQSX/CQ2X/CM2X

CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM

Free Mount Cylinder Series CU

AS120M AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 REA Free flow Effective area (mm2) 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C REB Dual Type REC Air Flow/Effective Area CY ASD230FM-M5 ASD330FM

Air Cylinder Series CM2

AS120M AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 REA Free flow Effective area (mm2) 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C REB Dual Type REC Air Flow/Effective Area CY ASD230FM-M5 ASD330FM

direction symbol on the resin body, One-touch fittings, Inch or metric sizes available for all models, Low speed control for small bore cylinders, CONTROLLER, DUAL SPEED, AIRLINE EQUIPMENT, ASD DUAL SPEED CONTROLLER, CD, ASD 1/8INCH MODULAR (NPT), .11556 lb, ModelApplicable tubing Metric sizeInch size 468101/8andquot;5/32andquot;3/16andquot;1/4andquot;5/16andquot;3/8andquot;ASD330FM

direction symbol on the resin body, One-touch fittings, Inch or metric sizes available for all models, Low speed control for small bore cylinders, CONTROLLER, DUAL SPEED, AIRLINE EQUIPMENT, ASD DUAL SPEED CONTROLLER, CD, ASD 1/8INCH MODULAR (NPT), .07160 lb, ModelApplicable tubing Metric sizeInch size 468101/8andquot;5/32andquot;3/16andquot;1/4andquot;5/16andquot;3/8andquot;ASD330FM

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Dual Type Flow rate and effective area Model ASD230FM-M5 ASD330FM-01 ASD430FM-02 8, 10 6 6, 8 Metric sizes 4, 6 Inch sizes Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" l/min (ANR) {Nl/min} 7 12 38 Flow rate Controlled flow Effective area mm 0.1 0.6 0.2 Free flow l/min (ANR) {Nl/min} Flow rate 175 350 295 75 Effective area mm 4.5 1.1 5.3 2.7 Note) Flow rates are values

CJ2X/CUX/CQSX/CQ2X/CM2X

CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM

Smooth Cylinder/Low Speed Cylinder

AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (L/min (ANR)) 38 7 12 REA Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (L/min (ANR)) 420 105 280 REB Free flow Effective area (mm2) 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C REC Dual Type CY Air Flow/Effective Area CX CX ASD230FM-M5 ASD330FM

CJ2X/CUX/CQSX/CQ2X/CM2X

CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM

Table of Contents

CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM

.: 07S (ø1/4")

This is a legacy product, and replaced byAS2201F-N02-07S, FLOW CONTROL W/FITTING *LQA, AIRLINE EQUIPMENT, AS***F 1/4INCHSTANDARD (NPT), .07319 lb

This is a legacy product, and replaced byAS3201F-N03-07S

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

This is a legacy product, and replaced byAS2301F-N02-07S-X35, SPEED CONTROL W/FITTING *LQA, AIRLINE EQUIPMENT, AS***F 1/4INCH(MISC./OTHER), .07539 lb

Air Cylinder NCQ7 Series Compact Cylinder

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return