Proposals for Energy Saving

VM132-M5-07 VM132-M5-07S Toggle lever VM130-01-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red Push button (Extended) VM130-01-32R VM130-01-32B VM130-01-32G VM130-01-32Y VM132-M5-32R VM132-M5-32B VM132-M5-32G VM132-M5-32Y VM-32AB

Flow Control Equipment

AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 ASD230F ASD330F

Table of Contents

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit Series ZYY/ZYX 1

port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector Valve Unit Series ZYY/ZYX Ejector Valve Specifications Series SY3000/SX3000 in manifold/split base combinations DIN rail mount type can be mounted ZY3-07S

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

CYP_EN

-01-06 Dual type (Speed controller) 10-ASD230F-M5-06 10-ASD330F-01-08 Note 1) See SMC Pneumatic Clean Series catalog for how to select the metal body piping type and resin-body One-touch fitting mounted type (front pages 14.3 How to use clean series).

CYP

Since alignment variations increase as the stroke gets longer, use a connection method which can absorb these variations and consider measures to control particulate generation. 10-AS2301F-01-06-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) 10-ASD330F-01-08 10-ASD230F-M5

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

Magnetically Coupled Rodless Cylinder

-ASD330F-01-08 10-ASD230F-M5-06 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32

-ASD330F-01-08 10-ASD230F-M5-06 2.

Basic type / Direct mount type Series CY3B/CY3R

-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-08-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-08-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

Body Size: 3 (1/8 Basis), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 05 (Ø3/16"), Sealant: S (Sealant)

Body Size: 3 (1/8 Basis), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 09 (Ø5/16"), Sealant: S (Sealant)

Body Size: 3 (1/8 Basis), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 09 (5/16"), Sealant: S (Sealant)

Body Size: 3 (1/8 Basis), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 05 (3/16"), Sealant: S (Sealant)

Body Size: 3 (1/8 Basis), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 05 (3/16"), Sealant: S (Sealant)

Body Size: 3 (1/8 Basis), Thread: N (NPT), Port Size: 01 (1/8), Applicable Tube OD: 09 (5/16"), Sealant: S (Sealant)