Process Pump

P U Panel mount union Union Ordering Example Tubing size 12 x 10 PAF3410S-1S13-B Process pump OUT side SMC LQ1E41-SN Union elbow LQ1U4B-SN Union PAF3410S-1S13-B 1 IN side SMC LQ1E41-SN (Union elbow) 1 LQ1U4B-SN (Union) 1 Tubing size 3/8" x 1/4" Note) Fittings which are ordered with the process pump at the same time will be shipped in a separate package. 600 Process Pump Automatically Operated

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P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-SN Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-SN (Union elbow) 1 LQ1E21-SN Union elbow LQ1U22-SN (Union) 1 Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

Fluoropolymer Piping Equipment

Metric size Inch size Series 1/8" 1/4" 3/8" 1/2" 3/4" 1" 11/4" Appearance Class 6 8 10 12 19 25 4 3 2 3 4 5 6 7 Straight adapter LQ3A P.933 2 3 4 5 6 Union flange LQ3F P.935 2 3 4 5 6 2 3 4 5 6 2 3 4 5 6 2 3 4 5 6 Space saving type union elbow LQ3E-SN P.936 Space saving type union tee LQ3T-SN P.936 Space saving type panel mount union LQ3P-SN P.936 Space saving type union LQ3U-SN P.936 1 2

Smooth Cylinder/Low Speed Cylinder

SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 1 Trunnion Nut Applicable retaining ring part no. (mm) Applicable bore size (mm) 20, 25 32, 40 Dd9 d L L1 m t Part no.

Clean Regulator/Fluororesin Type

AP100 Ordering example Tubing size 1/4" x 5/32" SRF10S-1S1107 Tubing size 4 x 3 SRF10S-1S1107 1 LQ1E3B-SN (Union elbow) 1 IN side OUT side SMC SMC LQ1T22-SN (Union tee) 1 LQ1E3B-SN (Union elbow) Note) For shipment, the regulator and fittings are individually packaged and dispatched together in 1 box.

Table of Contents

AS121-M5-F04 AS121-M5-F06 AS221-01-F06S AS221-01-F08S AS221-02-F06S AS221-02-F08S AS321-03-F08S AS321-03-F10S AS421-04-F10S AS421-04-F12S 12.7 12.5 33.7 30.7 56.3 52.1 92.9 87.6 153.8 145.5 21 21.5 25.5 26 16 17 17 18.5 17 18.5 18.5 21 21 22 M5 x 0.8 11.2 28.3 8 13 9 25.5 25 22.2 R 1/8 14.7 33.9 36.4 12 15.5 14.6 26.6 31.4 32.4 27.4 R 1/4 17.7 38.5 40.8 17 15.5 19.5 28.7 35.8 34.8 29.8 32.7

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

PF2D

Order example Tubing size 1/4" x 5/32" Tubing size 1/4" x 5/32" PFM PF2D504S-11-1-1S11 PFMB PFMC IN side OUT side SMC SMC PFMV PF2D504S-11-1-1S11 1 LQ1E3B-SN (Union elbow) PF2A LQ1T3B-SN (Union tee) LQ1E3B-SN (Union elbow) 1 PF3W LQ1T3B-SN (Union tee) 1 LFE Note) Flow sensors and fittings are shipped packed separately.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

ZP

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 Mounting thread (mm) Model A 19 SN-015A d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 B 21.9 H 5 6 9 8 M22 x 1.5 M16 M16 x 1.5 B M18 M18 x 1.5 M22 M22 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 Mounting nut part number for M14 x 1 is SN-015A.

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DBore size [mm] 32 40 50 63 80 100 -X Axial foot MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Rod flange MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 Technical Data Note) Order two foots per cylinder. 413 MBKW Series Theoretical Force OUT (Unit: N) IN Bore size [mm] Rod dia.

MB

Bore size (mm) 32 40 50 63 80 100 125 Note 1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 MB-L12 Foot MB-F03 MB-F04 MB-F05 MB-F06 MB-F08 MB-F10 MB-F12 Flange MB-C03 MB-C04 MB-C05 MB-C06 MB-C08 MB-C10 MB-C12 Single clevis Double clevis MB-D03 MB-D04 MB-D05 MB-D06 MB-D08 MB-D10 MB-D12 Note 1) Two foot brackets required for one cylinder.

CL

Bore (mm) 40 50 63 80 100 Foot CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 Flange CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 When ordering foot brackets, 2pcs. should be ordered for each cylinder. 3.1-46 Fine Lock Cylinder/Double Acting Double Rod Series CLAW Basic/CLAWB CL MLGC CNA CB CV/MVG (mm) Stroke range (mm) A Bore (mm) 40 50 63 80 100 C BQ D E BN J BP GD F GA AL GL GB GC B GR B1 H1 CXW

Tamper Proof and Flat Head Screw

AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2 40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04

Combination Cylinder

Auto switch model Bore size 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Foot D-A5/A6/A59W D-F5/J5/F5W/J59W D-F5NT, F5BA, F59F CA1-L04 CA1-L05 CA1-L06 CA1-L08 CA1-L10 BT-04 BT-04 BT-06 BT-08 BT-08 Flange Single clevis CA1-F04 CA1-F05 CA1-F06 CA1-F08 CA1-F10 D-A3/A44/G39/K39 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M CA1-C04 CA1-C05 CA1-C06 CA1-C08 CA1-C10 Double clevis D-B5/B6/B59W D-G5/K59

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

AS1201-M5-F04-X12 Ex.) AS1201-M5-F04-X21 Note 1) Not particle-free Note 2) Throttle valve is only compatible with the part no. of the meter-out type. Throttle Valve (Without Check Valve) 3 X214 Ex.)